Patents by Inventor Takuya Tsushima

Takuya Tsushima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11658058
    Abstract: Provided is a substrate holding apparatus capable of appropriately holding a substrate. The substrate holding apparatus is suggested to hold a substrate including a portion to be plated that is exposed to a plating solution and an edge portion that is an area outside the portion to be plated. The substrate holding apparatus comprises a grasp module to come in contact with the edge portion of the substrate and thereby grasp the substrate, a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated, and a protrusion provided at a position corresponding to the portion to be plated in the substrate, and protruding toward the substrate to be held by the substrate holding apparatus more than the suction module.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: May 23, 2023
    Assignee: EBARA CORPORATION
    Inventors: Takahiro Abe, Takuya Tsushima, Tomonori Hirao
  • Patent number: 11236434
    Abstract: A substrate attachment and detachment device appropriate for a double-sided holder is provided. The substrate attachment and detachment device is a device that holds a substrate in a substrate holder and/or releases the holding of the substrate using the substrate holder. The substrate holder includes a first frame and a second frame. The first frame and the second frame have openings, respectively. The device includes a substrate supporting unit that sandwiches the substrate between the first frame and the second frame. The substrate supporting unit includes a lower substrate supporter, and an upper substrate supporter. The lower substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on a lower side. The upper substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on an upper side.
    Type: Grant
    Filed: October 4, 2019
    Date of Patent: February 1, 2022
    Assignee: EBARA CORPORATION
    Inventor: Takuya Tsushima
  • Publication number: 20210262109
    Abstract: Provided is a substrate holding apparatus capable of appropnately holding a substrate. The substrate holding apparatus is suggested to hold a substrate including a portion to be plated that is exposed to a plating solution and an edge portion that is an area outside the portion to be plated. The substrate holding apparatus comprises a grasp module to come in contact with the edge portion of the substrate and thereby grasp the substrate, a suction module to attract the portion to be plated of the substrate by suction to hold the portion to be plated, and a protrusion provided at a position corresponding to the portion to be plated in the substrate, and protruding toward the substrate to be held by the substrate holding apparatus more than the suction module.
    Type: Application
    Filed: February 9, 2021
    Publication date: August 26, 2021
    Inventors: Takahiro Abe, Takuya Tsushima, Tomonori Hirao
  • Publication number: 20210249281
    Abstract: An aspect of the disclosure provides a substrate drying apparatus. The substrate drying apparatus includes: a gripping part, gripping an outer periphery part of a substrate that is square; a substrate nozzle, ejecting gas to the substrate gripped by the gripping part to dry the substrate; and a gripping part nozzle, ejecting gas to the gripping part to dry the substrate. The substrate nozzle is relatively movable with respect to the substrate in a first direction, and is able to eject the gas in the first direction toward the substrate. The gripping part nozzle is relatively movable with respect to the substrate in the first direction, and is able to eject the gas in a second direction intersecting with the first direction. The gripping part nozzle is disposed behind the substrate nozzle in the first direction.
    Type: Application
    Filed: January 28, 2021
    Publication date: August 12, 2021
    Applicant: EBARA CORPORATION
    Inventors: HIROTAKA OHASHI, TAKUYA TSUSHIMA, FUMIYA OKAZAKI
  • Publication number: 20210210368
    Abstract: An adjusting system is controlled such that an arrangement of the substrate is adjusted based on detection by a first sensor, and a second sensor is controlled to detect a characteristic point formed in advance on a plate surface of the substrate, wherein the arrangement of the substrate has been adjusted based on the detection by the first sensor. Moreover, it is checked whether a position of the characteristic point detected by the second sensor is within an allowable range, and the adjusting system is controlled to adjust the arrangement of the substrate based on the detection by the second sensor when the position of the characteristic point detected by the second sensor is within the allowable range, and the attaching/detaching system is controlled to attach the substrate to the substrate holder after the arrangement of the substrate is adjusted based on the detection by the second sensor.
    Type: Application
    Filed: January 4, 2021
    Publication date: July 8, 2021
    Inventors: Toshio Yokoyama, Tomonori Hirao, Takuya Tsushima, Hirotaka Ohashi
  • Patent number: 11015261
    Abstract: To provide a substrate holder and a plating apparatus that can easily position a substrate. A substrate holder includes a substrate holding body for holding a substrate, and a first holding member and a second holding member that interpose and hold the substrate holding body therebetween, and the first holding member includes an opening portion through which the plating target surface of the substrate is exposed, and a power supply member configured to be in contact with a plating target surface of the substrate.
    Type: Grant
    Filed: March 7, 2017
    Date of Patent: May 25, 2021
    Assignee: EBARA CORPORATION
    Inventors: Yoshitaka Mukaiyama, Toshio Yokoyama, Junitsu Yamakawa, Takuya Tsushima, Tomonori Hirao, Sho Tamura, Hirotaka Ohashi
  • Patent number: 10991605
    Abstract: A substrate processing device for processing a substrate, comprising an image sensor configured to detect positions of two corners on at least one diagonal of a substrate when the substrate is transferred to a predetermined position; an illuminating device that can be disposed so as to illuminate the two corners of the substrate on an opposite side of the substrate at the predetermined position relative to the image sensor; and a control device configured to determine the position of the substrate on the basis of the positions of the two corners, which are detected by the image sensor, the control device being configured to be capable of changing at least either light quantity or wavelength of output light of the illuminating device.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: April 27, 2021
    Assignee: EBARA CORPORATION
    Inventors: Junitsu Yamakawa, Takuya Tsushima
  • Patent number: 10665495
    Abstract: A substrate attachment/detachment device which clamps and holds a substrate by means of first and second retaining members of a substrate holder, the device comprising a first holder retainer configured to hold the first retaining member in a first posture; and a second holder retainer configured to be movable in a linear manner toward and away from the first holder retainer, capable of holding the second retaining member in the first posture and a second posture which is substantially orthogonal to the first posture, configured to push the second retaining member against the first retaining member in the first posture to lock the first and second retaining members to each other.
    Type: Grant
    Filed: December 21, 2017
    Date of Patent: May 26, 2020
    Assignee: EBARA CORPORATION
    Inventors: Toshio Yokoyama, Yoshitaka Mukaiyama, Takuya Tsushima
  • Publication number: 20200109485
    Abstract: A substrate attachment and detachment device appropriate for a double-sided holder is provided. The substrate attachment and detachment device is a device that holds a substrate in a substrate holder and/or releases the holding of the substrate using the substrate holder. The substrate holder includes a first frame and a second frame. The first frame and the second frame have openings, respectively. The device includes a substrate supporting unit that sandwiches the substrate between the first frame and the second frame. The substrate supporting unit includes a lower substrate supporter, and an upper substrate supporter. The lower substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on a lower side. The upper substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on an upper side.
    Type: Application
    Filed: October 4, 2019
    Publication date: April 9, 2020
    Applicant: EBARA CORPORATION
    Inventor: TAKUYA TSUSHIMA
  • Publication number: 20190181026
    Abstract: A substrate processing device for processing a substrate, comprising an image sensor configured to detect positions of two corners on at least one diagonal of a substrate when the substrate is transferred to a predetermined position; an illuminating device that can be disposed so as to illuminate the two corners of the substrate on an opposite side of the substrate at the predetermined position relative to the image sensor; and a control device configured to determine the position of the substrate on the basis of the positions of the two corners, which are detected by the image sensor, the control device being configured to be capable of changing at least either light quantity or wavelength of output light of the illuminating device.
    Type: Application
    Filed: December 12, 2018
    Publication date: June 13, 2019
    Inventors: Junitsu YAMAKAWA, Takuya TSUSHIMA
  • Publication number: 20190084777
    Abstract: To provide a substrate holder and a plating apparatus that can easily position a substrate. A substrate holder includes a substrate holding body for holding a substrate, and a first holding member and a second holding member that interpose and hold the substrate holding body therebetween, and the first holding member includes an opening portion through which the plating target surface of the substrate is exposed, and a power supply member configured to be in contact with a plating target surface of the substrate.
    Type: Application
    Filed: March 7, 2017
    Publication date: March 21, 2019
    Inventors: Yoshitaka MUKAIYAMA, Toshio YOKOYAMA, Junitsu YAMAKAWA, Takuya TSUSHIMA, Tomonori HIRAO, Sho TAMURA, Hirotaka OHASHI
  • Patent number: 10163672
    Abstract: A substrate processing device for processing a substrate, comprising: an image sensor for detecting positions of two corners on at least one diagonal line of a substrate when the substrate is moved to a predetermined position; an illuminating device that can be disposed so as to illuminate the two corners of the substrate on an opposite side of the substrate at the predetermined position to the image sensor; and a control device for determining the position of the substrate, based on the positions of the two corners detected by the image sensor.
    Type: Grant
    Filed: August 23, 2017
    Date of Patent: December 25, 2018
    Assignee: EBARA CORPORATION
    Inventors: Junitsu Yamakawa, Takuya Tsushima
  • Publication number: 20180286730
    Abstract: A substrate processing device for processing a substrate, comprising: an image sensor for detecting positions of two corners on at least one diagonal line of a substrate when the substrate is moved to a predetermined position; an illuminating device that can be disposed so as to illuminate the two corners of the substrate on an opposite side of the substrate at the predetermined position to the image sensor; and a control device for determining the position of the substrate, based on the positions of the two corners detected by the image sensor.
    Type: Application
    Filed: August 23, 2017
    Publication date: October 4, 2018
    Inventors: Junitsu YAMAKAWA, Takuya TSUSHIMA
  • Publication number: 20180182659
    Abstract: A substrate attachment/detachment device which clamps and holds a substrate by means of first and second retaining members of a substrate holder, the device comprising a first holder retainer configured to hold the first retaining member in a first posture; and a second holder retainer configured to be movable in a linear manner toward and away from the first holder retainer, capable of holding the second retaining member in the first posture and a second posture which is substantially orthogonal to the first posture, configured to push the second retaining member against the first retaining member in the first posture to lock the first and second retaining members to each other.
    Type: Application
    Filed: December 21, 2017
    Publication date: June 28, 2018
    Inventors: Toshio YOKOYAMA, Yoshitaka MUKAIYAMA, Takuya TSUSHIMA
  • Patent number: 5726709
    Abstract: An imaging apparatus comprises: a color separation optical system for separating an image ray into blue, green, and red image rays, image sensors, having pixels vertically and horizontally arranged, for receiving the image rays and producing blue, red, and green signals wherein at least one of image sensors for blue and red signals has a vertical relative offset against the image sensor for green signal to have a relative interlace relation with the image sensor for blue or red color signal, to produce a screen to be produced, having a higher resolution than these image sensors. A vertical high frequency component is operated from the blue and red signals and is added to the green color signal to produce a second green signal indicative of a green luminance value at a position corresponding to each pixel of the image sensors for blue and red color signals to increase the vertical resolution of the screen.
    Type: Grant
    Filed: December 30, 1996
    Date of Patent: March 10, 1998
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Kosuke Kinoshita, Takashi Shinozaki, Takuya Tsushima, Masaji Yoshida, Hiroyuki Kitamura, Tetsuya Suwa
  • Patent number: 5640206
    Abstract: An imaging apparatus comprises: a color separation optical system for separating an image ray into blue, green, and red image rays, image sensors, having pixels vertically and horizontally arranged, for receiving the image rays and producing blue, red, and green signals wherein at least one of image sensors for blue and red signals has a vertical relative offset against the image sensor for green signal to have a relative interlace relation with the image sensor for blue or red color signal, to produce a screen to be produced, having a higher resolution than these image sensors. A vertical high frequency component is operated from the blue and red signals and is added to the green color signal to produce a second green signal indicative of is a green luminance value at a position corresponding to each pixel of the image sensors for blue and red color signals to increase the vertical resolution of the screen.
    Type: Grant
    Filed: May 30, 1995
    Date of Patent: June 17, 1997
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Kosuke Kinoshita, Takashi Shinozaki, Takuya Tsushima, Masaji Yoshida, Hiroyuki Kitamura, Tetsuya Suwa
  • Patent number: 5428485
    Abstract: A magnetic recording/reproducing apparatus equipped with a rotating drum having on its circumferential surface video signal heads for recording and reproducing a video signal on and from a recording medium and PCM signal heads for recording and reproducing a PCM audio signal on and from the recording medium. The apparatus further comprising at least a video signal irregularity detecting circuit for detecting a disturbance of the video signal. When detecting the disturbance of the video signal, the irregularity detecting circuit interrupts the recording of the PCM audio signal onto the recording medium in the case that the apparatus simultaneously records the video signal and PCM audio signal.
    Type: Grant
    Filed: April 17, 1992
    Date of Patent: June 27, 1995
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Takuya Tsushima, Seiji Higurashi
  • Patent number: 5051846
    Abstract: A magnetic tape is wound on a rotary drum through a predetermined angular range greater than a standard tape winding angle. The predetermined angular range has a first portion corresponding to the standard tape winding angle and a second portion extending outward of the first portion. A main information signal is recorded into a main information recording track on the magnetic tape which extends in a region corresponding to the first portion of the predetermined angular range. A sub information signal is recorded into a sub information recording track on the magnetic tape which extends along an extension line of the main information recording track and which extnds in a region corresponding to the second portion of the predetermined angular range. A plurality of magnetic heads have different track widths respectively and are mounted on the rotary drum. The magnetic heads form respective different tracks which together constitute the sub information recording track.
    Type: Grant
    Filed: October 5, 1988
    Date of Patent: September 24, 1991
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Takuya Tsushima, Akira Hirota, Naomichi Nishimoto, Takashi Uchimi
  • Patent number: 5014274
    Abstract: A code-error correcting device which comprises a circuit for generating a pseudo-random or quasi-random function and which computes the EXCLUSIVE OR of digital information and an output of the circuit for generating the pseudo-random function and further supplies the computed value of the EXCLUSIVE OR to a digital modulator as an input thereof and in which an initial value for generating the pseudo-random function by the circuit for generating the pseudo-random function is set to be the address information or data block information related to the address information. Thereby, the receiving system can stably perform synchronous detection and bit synchronization on the basis of these turning points. Further, the capability of detecting address errors can be improved or increased and omission of the address error can be decreased.
    Type: Grant
    Filed: April 7, 1989
    Date of Patent: May 7, 1991
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Seiji Higurashi, Takuya Tsushima
  • Patent number: 4682251
    Abstract: A video signal reproducing apparatus comprises a reproducing circuit for reproducing from a recording medium a pre-recorded video signal having field correlation and having a predetermined band, and a noise reduction circuit supplied with a reproduced video signal from the reproducing circuit for essentially reducing noise included within the reproduced video signal.
    Type: Grant
    Filed: March 20, 1985
    Date of Patent: July 21, 1987
    Assignee: Victor Company of Japan, Ltd.
    Inventors: Akira Hirota, Takuya Tsushima