Abstract: In order to discriminate sites in a sample effectively, an imaging apparatus according to an embodiment is provided with: a light detector for detecting light radiated from a sample irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source; and a controller for adjusting the intensity of the first-wavelength infrared light or the intensity of the second-wavelength infrared light, and generating an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.

Abstract: A substrate carry-out device carries out an exposed substrate mounted on a substrate stage from a substrate holder by moving the substrate in one axis direction (X-axis direction) parallel to a horizontal plane in a state where the substrate is mounted on a substrate tray housed in the substrate holder. Meanwhile, a substrate carry-in device makes an unexposed substrate to be carried into the substrate stage wait at a substrate exchange position in a state where the unexposed substrate is mounted on another substrate tray, and after the exposed substrate is carried out from the substrate stage, lowers the another substrate tray, thereby mounting the unexposed substrate onto the substrate holder.