Abstract: There is provided a system and method of determining an overlay measurement between a first layer and a second layer of a specimen. The method includes acquiring a first image of a first structure on the first layer and a second image of a second structure on the second layer, obtaining one or more first regions of interest (ROIs) enclosing part of the first structure and one or more second ROIs enclosing part of the second structure, determining one or more first sets of symmetric sub-structures based on the first ROIs and one or more second sets of symmetric sub-structures based on the second ROIs, localizing a first center of symmetry (COS) based on a COS identified for each first set, and localizing a second COS based on a COS identified for each second set, and determining the overlay measurement based on the first COS and the second COS.

Abstract: There is provided a system and method of runtime examination of a semiconductor specimen. The method includes obtaining a runtime image representative of an inspection area of the specimen, the runtime image having a relatively low signal-to-noise ratio (SNR); and processing the runtime image using a machine learning (ML) model to obtain examination data specific for a given examination application, wherein the ML model is previously trained for the given examination application using one or more training samples, each training sample representative of a respective reference area sharing the same design pattern as the inspection area and comprising: a first training image of the respective reference area having a relatively low SNR; and label data indicative of ground truth in the respective reference area pertaining to the given examination application, the label data obtained by annotating a second training image of the respective reference area having a relatively high SNR.

Abstract: There is provided a system and method of segmenting an image of a fabricated semiconductor specimen. The method includes: obtaining a first probability map corresponding to the image representative of at least a portion of the fabricated semiconductor specimen and indicative of predicted probabilities of pixels in the image to correspond to one or more first structural elements presented in the image, obtaining a first label map informative of one or more segments representative of second structural elements and labels associated with the segments, performing simulation on the first label map to obtain a second probability map indicative of simulated probabilities of pixels in the first label map to correspond to the one or more segments, and generating a second label map based on the first probability map and the second probability map, the second label map being usable for segmentation of the image with enhanced repeatability.

Abstract: A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.

Abstract: There is provided a system and method of generating a training set for training a Deep Neural Network usable for examination of a specimen. The method includes: for each given training image in a group: i) generating a first batch of training patches, including cropping the given training image into a first plurality of original patches; and augmenting at least part of the first plurality of original patches in order to simulate variations caused by a physical process of the specimen; and ii) generating a second batch of training patches, including: shifting the plurality of first positions on the given training image to obtain a second plurality of original patches, and repeating the augmenting to the second plurality of original patches to generate a second plurality of augmented patches; and including at least the first second batches of training patches corresponding to each given training image in the training set.

Abstract: There is provided a system and method of segmenting an image of a fabricated semiconductor specimen. The method includes: obtaining a first probability map corresponding to the image representative of at least a portion of the fabricated semiconductor specimen and indicative of predicted probabilities of pixels in the image to correspond to one or more first structural elements presented in the image, obtaining a first label map informative of one or more segments representative of second structural elements and labels associated with the segments, performing simulation on the first label map to obtain a second probability map indicative of simulated probabilities of pixels in the first label map to correspond to the one or more segments, and generating a second label map based on the first probability map and the second probability map, the second label map being usable for segmentation of the image with enhanced repeatability.

Abstract: There is provided a system and method of generating a training set for training a Deep Neural Network usable for examination of a specimen. The method includes: for each given training image in a group: i) generating a first batch of training patches, including cropping the given training image into a first plurality of original patches; and augmenting at least part of the first plurality of original patches in order to simulate variations caused by a physical process of the specimen; and ii) generating a second batch of training patches, including: shifting the plurality of first positions on the given training image to obtain a second plurality of original patches, and repeating the augmenting to the second plurality of original patches to generate a second plurality of augmented patches; and including at least the first second batches of training patches corresponding to each given training image in the training set.

Abstract: A method, a non-transitory computer readable medium and a detection system for determining locations of suspected defects of a substrate.

Abstract: A holding and dispensing device may include at least one internal cartridge to hold at least one kind of spice, seasoning, salt or the like. The device may include a rotatable cap to select at least one spice to be poured and a rotatable flow selector to select the preferred flow of the selected spice or seasoning.

Abstract: A dispensing device for conveying powders or other flowing materials such as, for example, sugar, flour, oats, or rice is provided. The device may include a stand holding a tube or other conveyor and a connection unit which may be connected to a container. The tube may include a handle and a screw conveyor and the flowing materials may flow through the tube to be dispensed.