Patents by Inventor Tal VERDENE

Tal VERDENE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay design optimization
    Patent number: 10311198
    Abstract: A sample comprising an overlay target is presented. The overlay target comprises at least one pair of patterned structures, the patterned structures of the pair being accommodated in respectively bottom and top layers of the sample with a certain vertical distance h between them, wherein a pattern in at least one of the patterned structures has at least one pattern parameter optimized for a predetermined optical overlay measurement scheme with a predetermined wavelength range.
    Type: Grant
    Filed: February 16, 2015
    Date of Patent: June 4, 2019
    Assignee: NOVA MEASURING INSTRUMENTS LTD.
    Inventors: Gilad Barak, Tal Verdene, Michal Yachini, Dror Shafir, Changman Moon, Shay Wolfling
  • OVERLAY DESIGN OPTIMIZATION
    Publication number: 20170061066
    Abstract: A sample comprising an overlay target is presented. The overlay target comprises at least one pair of patterned structures, the patterned structures of the pair being accommodated in respectively bottom and top layers of the sample with a certain vertical distance h between them, wherein a pattern in at least one of the patterned structures has at least one pattern parameter optimized for a predetermined optical overlay measurement scheme with a predetermined wavelength range.
    Type: Application
    Filed: February 16, 2015
    Publication date: March 2, 2017
    Inventors: Gilad BARAK, Tal VERDENE, Michal YACHINI, Dror SHAFIR, Changman MOON, Shay WOLFLING