Patents by Inventor Talat F. Hasan

Talat F. Hasan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated surface metrology
    Patent number: 6829054
    Abstract: This invention is an instrument adaptable for integration into a process tool the combines a number of instruments for surface characterization. As an integrated process monitor, the invention is capable of monitoring surface dishing, surface erosion and thickness of residue layers on work-pieces with little time delay. The invention is adaptable to making measurements while a wafer or work-piece is either wet or dry. A preferred embodiment includes an integrated optical profiler adapted to surface profiling in the presence of optical interference arising from retro-reflections from underlying optical non-uniformities Alternate embodiments include an integrated stylus profiler with vibration isolation.
    Type: Grant
    Filed: September 3, 2003
    Date of Patent: December 7, 2004
    Assignee: Sensys Instruments Corporation
    Inventors: Fred E. Stanke, Talat F. Hasan, Michael Weber
  • Integrated surface metrology
    Publication number: 20040080757
    Abstract: This invention is an instrument adaptable for integration into a process tool the combines a number of instruments for surface characterization. As an integrated process monitor, the invention is capable of monitoring surface dishing, surface erosion and thickness of residue layers on work-pieces with little time delay. The invention is adaptable to making measurements while a wafer or work-piece is either wet or dry. A preferred embodiment includes an integrated optical profiler adapted to surface profiling in the presence of optical interference arising from retro-reflections from underlying optical non-uniformities Alternate embodiments include an integrated stylus profiler with vibration isolation.
    Type: Application
    Filed: September 3, 2003
    Publication date: April 29, 2004
    Inventors: Fred E. Stanke, Talat F. Hasan, Michael Weber
  • Integrated surface metrology
    Patent number: 6690473
    Abstract: This invention is an instrument adaptable for integration into a process tool the combines a number of instruments for surface characterization. As an integrated process monitor, the invention is capable of monitoring surface dishing, surface erosion and thickness of residue layers on work-pieces with little time delay. The invention is adaptable to making measurements while a wafer or work-piece is either wet or dry. A preferred embodiment includes an integrated optical profiler adapted to surface profiling in the presence of optical interference arising from retro-reflections from underlying optical non-uniformities. Alternate embodiments include an integrated stylus profiler with vibration isolation.
    Type: Grant
    Filed: February 1, 2000
    Date of Patent: February 10, 2004
    Assignee: Sensys Instruments Corporation
    Inventors: Fred E. Stanke, Talat F. Hasan, Michael Weber