Patents by Inventor Tamihiro Bun

Tamihiro Bun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus control system and substrate processing apparatus
    Patent number: 6963789
    Abstract: A controller is connected to a substrate processing apparatus and an exposure apparatus. A pilot substrate subjected to a series of processing as preprocessing is transported to an inspection unit. An inspection result determination part compares inspection results received from the inspection unit with substrate condition data so that a condition change instruction part changes the processing condition of each processing unit when no requirement is satisfied. This operation is so repeated that a processing control part executes actual processing according to recipe data when the inspection results satisfy the requirement. Thus, the efficiency a step of changing the processing condition of each processing part in response to the inspection results in the inspection part is improved in preprocessing executed in the substrate processing apparatus.
    Type: Grant
    Filed: September 23, 2002
    Date of Patent: November 8, 2005
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Noriaki Yokono, Kenji Sugimoto, Tsuyoshi Mitsuhashi
  • Substrate processing apparatus control system and substrate processing apparatus
    Publication number: 20030060917
    Abstract: A controller is connected to a substrate processing apparatus and an exposure apparatus. A pilot substrate subjected to a series of processing as preprocessing is transported to an inspection unit. An inspection result determination part compares inspection results received from the inspection unit with substrate condition data so that a condition change instruction part changes the processing condition of each processing unit when no requirement is satisfied. This operation is so repeated that a processing control part executes actual processing according to recipe data when the inspection results satisfy the requirement. Thus, the efficiency a step of changing the processing condition of each processing part in response to the inspection results in the inspection part is improved in preprocessing executed in the substrate processing apparatus.
    Type: Application
    Filed: September 23, 2002
    Publication date: March 27, 2003
    Applicant: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Tamihiro Bun, Kinya Murata, Kenji Hashinoki, Kenji Kamei, Noriaki Yokono, Kenji Sugimoto, Tsuyoshi Mitsuhashi