Patents by Inventor Tamirisa V. V. R. Apparao

Tamirisa V. V. R. Apparao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7111467
    Abstract: Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.
    Type: Grant
    Filed: February 25, 2002
    Date of Patent: September 26, 2006
    Assignee: Brooks Automation, Inc.
    Inventors: Tamirisa V. V. R. Apparao, Oleg Podtcherniaev, Kevin P. Flynn, Paul Hall, Roger Lachenbruch, Mikhail Boiarski
  • Publication number: 20040129015
    Abstract: Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.
    Type: Application
    Filed: February 9, 2004
    Publication date: July 8, 2004
    Inventors: Tamirisa V V R Apparao, Oleg Podtcherniaev, Kevin P Flynn, Paul Hall, Roger Lachenbruch, Mikhail Boiarski
  • Patent number: 6481223
    Abstract: Refrigerants containing R-22 are replaced with new blends by using R-125, or R-125 with R-124, or R-218, or R-218 with R-124, in place of R-22. No hardware or oil composition changes are required to maintain temperatures, pressures and capacity substantially unchanged in a refrigeration system.
    Type: Grant
    Filed: November 30, 2000
    Date of Patent: November 19, 2002
    Assignee: Intermagnetics General Corporation-Polycold Systems, Inc.
    Inventors: Kevin P. Flynn, Mikhail Boiarski, Tamirisa V. V. R. Apparao, Oleg Podtcherniaev, Vladimir Mogorichny
  • Publication number: 20010042379
    Abstract: Refrigerants containing R-22 are replaced with new blends by using R-125, or R-125 with R-124, or R-218, or R-218 with R-124, in place of R-22. No hardware or oil composition changes are required to maintain temperatures, pressures and capacity substantially unchanged in a refrigeration system.
    Type: Application
    Filed: November 30, 2000
    Publication date: November 22, 2001
    Inventors: Kevin P. Flynn, Mikhail Boiarski, Tamirisa V.V.R. Apparao, Oleg Podtcherniaev, Vladimir Mogorichny