Abstract: A method and apparatus thereof for fabricating an integrated circuit on a laminate having a gate electrode layer over a silicon dioxide layer. Detection of the gate etch endpoint signal is improved by maximizing the use of a faster etching dopant material (e.g., n-type dopant) and minimizing the use of a slower etching dopant material (e.g., p-type dopant) in the gate electrode layer. In one embodiment, a first portion of the gate electrode layer, substantially corresponding only to the location at which a gate is to be formed, is doped with the slower etching dopant material. The remaining portion of the gate electrode layer is doped with the faster etching dopant material; thus, more of the gate electrode layer is doped with the faster etching dopant material than with the slower etching dopant material. A gate mask is aligned over the gate electrode layer, and the unmasked portions of the gate electrode layer are removed using an etchant.

Abstract: A method and apparatus thereof for fabricating an integrated circuit on a laminate having a gate electrode layer over a silicon dioxide layer. Detection of the gate etch endpoint signal is improved by maximizing the use of a faster etching dopant material (e.g., n-type dopant) and minimizing the use of a slower etching dopant material (e.g., p-type dopant) in the gate electrode layer. In one embodiment, a first portion of the gate electrode layer, substantially corresponding only to the location at which a gate is to be formed, is doped with the slower etching dopant material. The remaining portion of the gate electrode layer is doped with the faster etching dopant material; thus, more of the gate electrode layer is doped with the faster etching dopant material than with the slower etching dopant material. A gate mask is aligned over the gate electrode layer, and the unmasked portions of the gate electrode layer are removed using an etchant.

Abstract: A method and apparatus thereof for fabricating an integrated circuit on a laminate having a gate electrode layer over a silicon dioxide layer. Detection of the gate etch endpoint signal is improved by maximizing the use of a faster etching dopant material (e.g., n-type dopant) and minimizing the use of a slower etching dopant material (e.g., p-type dopant) in the gate electrode layer. In one embodiment, a first portion of the gate electrode layer, substantially corresponding only to the location at which a gate is to be formed, is doped with the slower etching dopant material. The remaining portion of the gate electrode layer is doped with the faster etching dopant material; thus, more of the gate electrode layer is doped with the faster etching dopant material than with the slower etching dopant material. A gate mask is aligned over the gate electrode layer, and the unmasked portions of the gate electrode layer are removed using an etchant.

Abstract: The present invention provides methods for intelligently filling a gate layer with dummy fill patterns to produce a target pattern density. A gate layout defining gate areas on the gate layer is provided along with a diffusion layout defining active diffusion areas over a semiconductor substrate. For the gate layout, a pattern density is determined. Then, the areas not occupied by the gate areas and the diffusion areas are determined. Additionally, a range of pattern densities is provided in a set of predefined fill patterns with each predefined fill pattern having a plurality of dummy fill patterns and being associated with a pattern density within the provided range of pattern densities. Among the set of predefined fill patterns, a predefined fill pattern is selected for producing the target pattern density. Then, the gate layer is filled by placing the dummy fill patterns of the selected predefined fill pattern in the areas not occupied by the gate areas and the diffusion areas.