Patents by Inventor Tammy Jo Pride

Tammy Jo Pride has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low particle protected flapper valve
    Patent number: 10969029
    Abstract: Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: April 6, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Charles T. Carlson, Tammy Jo Pride, Benjamin B. Riordon, Aaron Webb
  • LOW PARTICLE PROTECTED FLAPPER VALVE
    Publication number: 20190293199
    Abstract: Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.
    Type: Application
    Filed: December 1, 2017
    Publication date: September 26, 2019
    Inventors: Charles T. CARLSON, Tammy Jo PRIDE, Benjamin B. RIORDON, Aaron WEBB
  • Active substrate alignment system and method
    Patent number: 10217657
    Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: February 26, 2019
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson
  • ACTIVE SUBSTRATE ALIGNMENT SYSTEM AND METHOD
    Publication number: 20170294330
    Abstract: An active substrate alignment system for an ion implanter, the system including a platen, a registration device adapted to selectively move a substrate engagement surface disposed adjacent the platen for limiting movement of a substrate disposed on the platen, a camera configured to capture an image of the substrate before the substrate is disposed on the platen, and a controller in communication with the camera and the registration device, the controller configured to command the registration device to move the substrate engagement surface based on the image to limit movement of the substrate in a predetermined manner.
    Type: Application
    Filed: September 4, 2015
    Publication date: October 12, 2017
    Inventors: Aaron P. Webb, Timothy J. Miller, Tammy Jo Pride, Christopher N. Grant, James D. Strassner, Charles T. Carlson