Patents by Inventor Tan-Cheng Chen

Tan-Cheng Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR VISUAL INSPECTION OF WAFER
    Publication number: 20070076196
    Abstract: A method for performing a visual inspection of a wafer is described. First, a visual inspection system for a wafer comprising at least a wafer carrying apparatus, a light source and a reflecting element is provided. The wafer carrying apparatus is used for carrying a wafer. The light source is disposed relative to the wafer carrying apparatus for illuminating the backside of the wafer. The reflecting element is disposed relative to the wafer carrying apparatus for receiving the reflection from the backside of the wafer. Then, a wafer is placed on the wafer carrying apparatus and the backside of the wafer is illuminated using the light source. Thereafter, the wafer surface and the backside of the wafer reflected to the reflecting element are inspected.
    Type: Application
    Filed: July 20, 2006
    Publication date: April 5, 2007
    Applicant: POWERCHIP SEMICONDUCTOR CORP.
    Inventors: Kuo-Chung Liu, Tan-Cheng Chen, Ching-Sung Tai, Renn-Chung Chiu