Patents by Inventor Tan-Ju WANG

Tan-Ju WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Virtual metrology method using convolutional neural network and computer program product thereof
    Patent number: 11921474
    Abstract: A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: March 5, 2024
    Assignee: NATIONAL CHENG KUNG UNIVERSITY
    Inventors: Fan-Tien Cheng, Yu-Ming Hsieh, Tan-Ju Wang, Li-Hsuan Peng, Chin-Yi Lin
  • VIRTUAL METROLOGY METHOD USING CONVOLUTIONAL NEURAL NETWORK AND COMPUTER PROGRAM PRODUCT THEREOF
    Publication number: 20220026861
    Abstract: A virtual metrology method using a convolutional neural network (CNN) is provided. In this method, a dynamic time warping (DTW) algorithm is used to delete unsimilar sets of process data, and adjust the sets of process data to be of the same length, thereby enabling the CNN to be used for virtual metrology. A virtual metrology model of the embodiments of the present invention includes several CNN models and a conjecture model, in which plural inputs of the CNN model are sets of time sequence data of respective parameters, and plural outputs of the CNN models are inputs to the conjecture model.
    Type: Application
    Filed: May 25, 2021
    Publication date: January 27, 2022
    Inventors: Fan-Tien CHENG, Yu-Ming HSIEH, Tan-Ju WANG, Li-Hsuan PENG, Chin-Yi LIN