Patents by Inventor Tan Kok Chua

Tan Kok Chua has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for cutting semiconductor wafers
    Patent number: 7018270
    Abstract: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, a the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.
    Type: Grant
    Filed: July 28, 2005
    Date of Patent: March 28, 2006
    Assignee: Micron Technology, Inc.
    Inventors: Neo Chee Peng, Tan Hock Chuan, Ho Kian Seng, Chew Beng Chye, Lim Guek Har, Tan Kok Chua
  • Method and apparatus for cutting semiconductor wafers
    Patent number: 6939199
    Abstract: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, a the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.
    Type: Grant
    Filed: June 2, 2003
    Date of Patent: September 6, 2005
    Assignee: Micron Technology, Inc.
    Inventors: Neo Chee Peng, Tan Hock Chuan, Ho Kian Seng, Chew Beng Chye, Lim Guek Har, Tan Kok Chua
  • Method and apparatus for cutting semiconductor wafers
    Publication number: 20030203538
    Abstract: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, a the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.
    Type: Application
    Filed: June 2, 2003
    Publication date: October 30, 2003
    Inventors: Neo Chee Peng, Tan Hock Chuan, Ho Kian Seng, Chew Beng Chye, Lim Guek Har, Tan Kok Chua
  • Method for cutting semiconductor wafers
    Patent number: 6576531
    Abstract: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: June 10, 2003
    Assignee: Micron Technology, Inc.
    Inventors: Neo Chee Peng, Tan Hock Chuan, Ho Kian Seng, Chew Beng Chye, Lim Guek Har, Tan Kok Chua
  • METHOD FOR CUTTING SEMICONDUCTOR WAFERS
    Publication number: 20030060022
    Abstract: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, a the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.
    Type: Application
    Filed: August 30, 2001
    Publication date: March 27, 2003
    Inventors: Neo Chee Peng, Tan Hock Chuan, Ho Kian Seng, Chew Beng Chye, Lim Guek Har, Tan kok Chua