Patents by Inventor Tan Shida

Tan Shida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carbon nanotube interconnects in porous diamond interlayer dielectrics
    Patent number: 7365003
    Abstract: A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.
    Type: Grant
    Filed: December 29, 2004
    Date of Patent: April 29, 2008
    Assignee: Intel Corporation
    Inventors: Kramadhati V. Ravi, Tan Shida, Jim Maveety
  • Carbon nanotube interconnects in porous diamond interlayer dielectrics
    Publication number: 20060138658
    Abstract: A method and structure for using porous diamond interlayer dielectrics (ILDs) in conjunction with carbon nanotube interconnects is herein described. A diamond ILD is deposited on an underlaying layer. The diamond layer is optionally and selectively removed of non-sp3 bond to create a porous diamond film. Trenches and vias are etched in the porous diamond ILD. Carbon nanotubes are deposited on the diamond ILD filling the trenches using a liquid crystal host-carbon nanotube solution. Using methods of nematic liquid crystal alignment, the carbon nanotubes are aligned under the influence of the liquid crystals. At least some of the liquid crystal solution is removed leaving an aligned carbon nanotubes.
    Type: Application
    Filed: December 29, 2004
    Publication date: June 29, 2006
    Inventors: Kramadhati Ravi, Tan Shida, Jim Maveety