Patents by Inventor Tang-Xuan Zhong

Tang-Xuan Zhong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11355642
    Abstract: Methods for manufacturing semiconductor structures are provided. The method includes forming a first masking layer over a substrate and forming a second masking layer over the first masking layer. The method includes forming a photoresist pattern over the second masking layer and patterning the second masking layer through the photoresist pattern. The method further includes diminishing the photoresist pattern and patterning the second masking layer and the first masking layer through the diminished photoresist pattern. The method further includes removing the diminished photoresist pattern and patterning the semiconductor substrate through the second masking layer and the first masking layer to form a fin structure. The method further includes forming a gate structure over the fin structure.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: June 7, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Ju-Wang Hsu, Chih-Yuan Ting, Tang-Xuan Zhong, Yi-Nien Su, Jang-Shiang Tsai
  • Publication number: 20200052122
    Abstract: Methods for manufacturing semiconductor structures are provided. The method includes forming a first masking layer over a substrate and forming a second masking layer over the first masking layer. The method includes forming a photoresist pattern over the second masking layer and patterning the second masking layer through the photoresist pattern. The method further includes diminishing the photoresist pattern and patterning the second masking layer and the first masking layer through the diminished photoresist pattern. The method further includes removing the diminished photoresist pattern and patterning the semiconductor substrate through the second masking layer and the first masking layer to form a fin structure. The method further includes forming a gate structure over the fin structure.
    Type: Application
    Filed: October 18, 2019
    Publication date: February 13, 2020
    Inventors: Ju-Wang HSU, Chih-Yuan TING, Tang-Xuan ZHONG, Yi-Nien SU, Jang-Shiang TSAI
  • Patent number: 10483397
    Abstract: A fin field effect transistor and method of forming the same. The fin field effect transistor includes a semiconductor substrate having a fin structure and between two trenches with top portions and bottom portions. The fin field effect transistor further includes shallow trench isolations formed in the bottom portions of the trenches and a gate electrode over the fin structure and the shallow trench isolation, wherein the gate electrode is substantially perpendicular to the fin structure. The fin field effect transistor further includes a gate dielectric layer along sidewalls of the fin structure and source/drain electrode formed in the fin structure.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: November 19, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Ju-Wang Hsu, Chih-Yuan Ting, Tang-Xuan Zhong, Yi-Nien Su, Jang-Shiang Tsai
  • Publication number: 20150137265
    Abstract: A fin field effect transistor and method of forming the same. The fin field effect transistor includes a semiconductor substrate having a fin structure and between two trenches with top portions and bottom portions. The fin field effect transistor further includes shallow trench isolations formed in the bottom portions of the trenches and a gate electrode over the fin structure and the shallow trench isolation, wherein the gate electrode is substantially perpendicular to the fin structure. The fin field effect transistor further includes a gate dielectric layer along sidewalls of the fin structure and source/drain electrode formed in the fin structure.
    Type: Application
    Filed: December 24, 2014
    Publication date: May 21, 2015
    Inventors: Ju-Wang HSU, Chih-Yuan TING, Tang-Xuan ZHONG, Yi-Nien SU, Jang-Shiang TSAI
  • Patent number: 8927353
    Abstract: A fin field effect transistor and method of forming the same. The fin field effect transistor includes a semiconductor substrate having a fin structure and between two trenches with top portions and bottom portions. The fin field effect transistor further includes shallow trench isolations formed in the bottom portions of the trenches and a gate electrode over the fin structure and the shallow trench isolation, wherein the gate electrode is substantially perpendicular to the fin structure. The fin field effect transistor further includes a gate dielectric layer along sidewalls of the fin structure and source/drain electrode formed in the fin structure.
    Type: Grant
    Filed: May 7, 2007
    Date of Patent: January 6, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Wang Hsu, Chih-Yuan Ting, Tang-Xuan Zhong, Yi-Nien Su, Jang-Shiang Tsai
  • Patent number: 7511988
    Abstract: A static random access memory (SRAM) cell includes a first load device, a first pull-down transistor, and a switch-box coupled between the first load device and the first pull-down transistor. The switch-box is configured to receive a switch control signal to turn off a first connection between the first load device and the first pull-down transistor during read operations of the SRAM cell and to turn on the first connection during write operations.
    Type: Grant
    Filed: July 10, 2006
    Date of Patent: March 31, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wesley Lin, Fang-Shi Jordan Lai, Chia-Fu Lee, Sheng Chi Lin, Ping-Wei Wang, Chang-Yun Chang, Tang-Xuan Zhong, Tsung-Lin Lee
  • Publication number: 20080277745
    Abstract: A fin field effect transistor and method of forming the same. The fin field effect transistor comprises a semiconductor substrate having a fin structure and between two trenches with top portions and bottom portions. The fin field effect transistor further comprises shallow trench isolations formed in the bottom portions of the trenches and a gate electrode over the fin structure and the shallow trench isolation, wherein the gate electrode is substantially perpendicular to the fin structure. The fin field effect transistor further comprises a gate dielectric layer along sidewalls of the fin structure and source/drain electrode formed in the fin structure.
    Type: Application
    Filed: May 7, 2007
    Publication date: November 13, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ju-Wang Hsu, Chih-Yuan Ting, Tang-Xuan Zhong, Yi-Nien Su, Jang-Shiang Tsai
  • Patent number: 7381649
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: July 29, 2005
    Date of Patent: June 3, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yun Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang
  • Publication number: 20070268747
    Abstract: A static random access memory (SRAM) cell includes a first load device, a first pull-down transistor, and a switch-box coupled between the first load device and the first pull-down transistor. The switch-box is configured to receive a switch control signal to turn off a first connection between the first load device and the first pull-down transistor during read operations of the SRAM cell and to turn on the first connection during write operations.
    Type: Application
    Filed: July 10, 2006
    Publication date: November 22, 2007
    Inventors: Wesley Lin, Fang-Shi Jordan Lai, Chia-Fu Lee, Sheng Chi Lin, Ping-Wei Wang, Chang-Yun Chang, Tang-Xuan Zhong, Tsung-Lin Lee
  • Patent number: 7265425
    Abstract: A semiconductor device formed on a semiconductor substrate and a method of forming the same. In one embodiment, the semiconductor device includes a gate over the semiconductor substrate and a dielectric liner on a sidewall of the gate. The semiconductor device also includes an extension spacer adjacent and extending laterally beyond the dielectric liner along the semiconductor substrate. The semiconductor device further includes a source/drain located below an upper surface of the semiconductor substrate and adjacent a channel region under the gate. The source/drain extends under the dielectric liner and the extension spacer. The semiconductor device still further includes a silicide region over a portion of the source/drain and extending laterally beyond the extension spacer along the semiconductor substrate. Thus, the extension spacer is interposed between the dielectric liner and the silicide region located over a portion of the source/drain.
    Type: Grant
    Filed: November 15, 2004
    Date of Patent: September 4, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuang-Hsin Chen, Tang-Xuan Zhong, Chien-Chao Huang, Cheng-Kuo Wen, Di-Hong Lee
  • Publication number: 20070026629
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Application
    Filed: July 29, 2005
    Publication date: February 1, 2007
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu
  • Publication number: 20060102955
    Abstract: A semiconductor device formed on a semiconductor substrate and a method of forming the same. In one embodiment, the semiconductor device includes a gate over the semiconductor substrate and a dielectric liner on a sidewall of the gate. The semiconductor device also includes an extension spacer adjacent and extending laterally beyond the dielectric liner along the semiconductor substrate. The semiconductor device further includes a source/drain located below an upper surface of the semiconductor substrate and adjacent a channel region under the gate. The source/drain extends under the dielectric liner and the extension spacer. The semiconductor device still further includes a silicide region over a portion of the source/drain and extending laterally beyond the extension spacer along the semiconductor substrate. Thus, the extension spacer is interposed between the dielectric liner and the silicide region located over a portion of the source/drain.
    Type: Application
    Filed: November 15, 2004
    Publication date: May 18, 2006
    Inventors: Kuang-Hsin Chen, Tang-Xuan Zhong, Chien-Chao Huang, Cheng-Kuo Wen, Di-Hong Lee
  • Patent number: RE45165
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: September 30, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yu Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang
  • Patent number: RE45180
    Abstract: A method for forming a semiconductor device and a device made using the method are provided. In one example, the method includes forming a hard mask layer on a semiconductor substrate and patterning the hard mask layer to form multiple openings. The substrate is etched through the openings to form forming a plurality of trenches separating multiple semiconductor mesas. The trenches are partially filled with a dielectric material. The hard mask layer is removed and multiple-gate features are formed, with each multiple-gate feature being in contact with a top surface and sidewalls of at least one of the semiconductor mesas.
    Type: Grant
    Filed: June 2, 2010
    Date of Patent: October 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Wei Chen, Tang-Xuan Zhong, Sheng-Da Liu, Chang-Yun Chang, Ping-Kun Wu, Chao-Hsiung Wang, Fu-Liang Yang