Patents by Inventor Tanigawa Eiki

Tanigawa Eiki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas injection system for chemical vapor deposition device
    Patent number: 6444042
    Abstract: A gas injection system for a chemical vapor deposition device includes a gas providing pipe providing gases into the system, a shower head unit coupled to the gas providing pipe for evenly injecting the gases on a wafer, and a temperature control unit coupled to the shower head unit for controlling a temperature of the shower head unit.
    Type: Grant
    Filed: February 23, 2000
    Date of Patent: September 3, 2002
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventors: Seung Yoon Yang, In Jae Park, Jong Woo Yoon, Chang Jae Kim, Tanigawa Eiki