Patents by Inventor Tanja Ippisch

Tanja Ippisch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a device on a substrate
    Patent number: 8999187
    Abstract: A method for manufacturing a device on a substrate includes forming a layer structure on the substrate, forming an auxiliary layer on the layer structure, forming a planarization layer on the auxiliary layer and on the substrate, exposing the auxiliary layer by a chemical mechanical polishing process and removing at least partly the auxiliary layer to form a planar surface of the remaining auxiliary layer or of the layer structure and the planarization layer. The chemical mechanical polishing process has a first removal rate with respect to the planarization layer and a second removal rate with respect to the auxiliary layer and the first removal rate is greater than the second removal rate.
    Type: Grant
    Filed: November 27, 2013
    Date of Patent: April 7, 2015
    Assignee: Infineon Technologies AG
    Inventors: Sandra Obernhuber, Christof Jalics, Joerg Adler, Uwe Hoeckele, Walter Preis, Reinhard Goellner, Tanja Ippisch, Patricia Nickut