Patents by Inventor TAO JU
TAO JU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10012670Abstract: A method of making a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass.Type: GrantFiled: October 20, 2014Date of Patent: July 3, 2018Assignee: Insigh Tech, LLCInventors: Biao Zhang, Tao Ju
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Publication number: 20180010959Abstract: A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.Type: ApplicationFiled: April 4, 2017Publication date: January 11, 2018Inventors: Biao Zhang, Tao Ju
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Publication number: 20160154019Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion for generating magnetic field, and a spintronic device for measuring the magnetic field. The conducting wire is disposed such that the current it carries is substantially perpendicular to the sensing direction of the sensing mode of the proof-mass.Type: ApplicationFiled: October 20, 2014Publication date: June 2, 2016Applicant: InSighTech, LLCInventors: Biao Zhang, Tao Ju
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Publication number: 20160153780Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprises a movable portion capable of moving in response to angular velocity, a conducting wire attached to the movable portion for generating magnetic field, and a spintronic device for measuring the magnetic field. The easy axis of the spintronic device is aligned to the sensing mode of the movable portion and to the direction of the current flowing through the conducting wire.Type: ApplicationFiled: October 20, 2014Publication date: June 2, 2016Applicant: InSighTech, LLCInventors: Biao Zhang, Tao Ju
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Publication number: 20160154020Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass, wherein the magnetic sensing mechanism comprises an integrated pickup coil of a fluxgate. A magnetic shield is provided in the vicinity of the magnetic source.Type: ApplicationFiled: October 20, 2014Publication date: June 2, 2016Applicant: INSIGHTECH, LLCInventors: Biao Zhang, Tao Ju
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Publication number: 20160154070Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass. The magnetic sensor wafer and MEMS wafer are bonded through a bonding mechanism that comprises a hearting mechanism.Type: ApplicationFiled: October 13, 2014Publication date: June 2, 2016Applicant: INSIGHTECH, LLCInventors: Biao Zhang, Tao Ju
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Patent number: 9254992Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.Type: GrantFiled: April 15, 2013Date of Patent: February 9, 2016Inventor: Tao Ju
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Publication number: 20150226555Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism is disposed at a location wherein the magnetic field gradient from the magnetic source is maximum.Type: ApplicationFiled: February 11, 2014Publication date: August 13, 2015Applicant: InSighTech, LLCInventors: Biao Zhang, Tao Ju
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Publication number: 20150033856Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a driving mechanism, a magnetic sensing mechanism and a magnetic source that is formed at the proof-mass. The MEMS gyroscope is enclosed in a package that further comprises a magnet for providing bias magnetic field.Type: ApplicationFiled: October 20, 2014Publication date: February 5, 2015Applicant: INSIGHTECH, LLCInventors: BIAO ZHANG, TAO JU
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Publication number: 20150033853Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.Type: ApplicationFiled: October 20, 2014Publication date: February 5, 2015Applicant: INSIGHTECH, LLCInventors: Biao Zhang, TAO JU
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Publication number: 20150033854Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.Type: ApplicationFiled: October 20, 2014Publication date: February 5, 2015Applicant: IINSIGHTECH, LLCInventors: BIAO ZHANG, TAO JU
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Publication number: 20150033855Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.Type: ApplicationFiled: October 20, 2014Publication date: February 5, 2015Applicant: INSIGHTECH, LLCInventors: Biao ZHANG, Tao JU
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Publication number: 20150034620Abstract: A method of making a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism on a magnetic sensor wafer and a magnetic source on a MEMS wafer that further comprises a proof-mass.Type: ApplicationFiled: October 20, 2014Publication date: February 5, 2015Applicant: INSIGHTECH, LLCInventors: BIAO ZHANG, TAO JU
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Publication number: 20140308757Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.Type: ApplicationFiled: April 15, 2013Publication date: October 16, 2014Inventor: Tao Ju
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Publication number: 20140290365Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator.Type: ApplicationFiled: April 2, 2013Publication date: October 2, 2014Inventor: Tao Ju
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Publication number: 20140190257Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.Type: ApplicationFiled: July 6, 2013Publication date: July 10, 2014Inventors: Biao Zhang, Tao Ju
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Publication number: 20140026660Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.Type: ApplicationFiled: July 6, 2013Publication date: January 30, 2014Inventors: Biao Zhang, Tao Ju
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Publication number: 20140026659Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.Type: ApplicationFiled: July 5, 2013Publication date: January 30, 2014Inventors: BIAO ZHANG, TAO JU
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Publication number: 20140026661Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.Type: ApplicationFiled: July 6, 2013Publication date: January 30, 2014Inventors: Biao Zhang, Tao Ju
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Publication number: 20140026658Abstract: A method of using a MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism. A magnetic field is generated by a magnetic source, and is detected by a magnetic sensor. The magnetic field varies at the location of the magnetic sensor; and the variation of the magnetic field is associated with the movement of the proof-mass of the MEMS gyroscope. By detecting the variation of the magnetic field, the movement and thus the target angular velocity can be measured.Type: ApplicationFiled: July 5, 2013Publication date: January 30, 2014Inventors: BIAO ZHANG, TAO JU