Patents by Inventor Tao-Min Chang

Tao-Min Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR MACHINE AND CLEANING PROCESS THEREOF
    Publication number: 20120205045
    Abstract: A semiconductor machine and a cleaning process are provided. The semiconductor machine includes a chamber and a cleaning module. The cleaning process includes the following steps. Firstly, the semiconductor machine is used to perform a semiconductor manufacturing process, wherein a titanium-based material is etched in the semiconductor manufacturing process. Then, a cleaning task is activated to clean the semiconductor machine by using a cleaning agent including a gas mixture of a fluoride compound and oxygen.
    Type: Application
    Filed: February 11, 2011
    Publication date: August 16, 2012
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Li-Hsun HO, Ching-Shing Huang, Chih-Hui Shen, Tao-Min Chang