Patents by Inventor Taras Shvets

Taras Shvets has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Side seal for wet lens elements
    Patent number: 9195148
    Abstract: A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
    Type: Grant
    Filed: July 13, 2010
    Date of Patent: November 24, 2015
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Taras Shvets, Richard Bruls
  • Side Seal for Wet Lens Elements
    Publication number: 20100271605
    Abstract: A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
    Type: Application
    Filed: July 13, 2010
    Publication date: October 28, 2010
    Applicant: ASML Holding N.V.
    Inventors: Matthew Lipson, Taras Shvets, Richard Bruls
  • Side seal for wet lens elements
    Patent number: 7781029
    Abstract: A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: August 24, 2010
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Taras Shvets, Richard Bruls
  • Side seal for wet lens elements
    Publication number: 20060240365
    Abstract: A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
    Type: Application
    Filed: June 23, 2006
    Publication date: October 26, 2006
    Applicant: ASML Holding N.V.
    Inventors: Matthew Lipson, Taras Shvets, Richard Bruls