Abstract: In an inductive coupling type plasma torch unit, a solenoid coil is arranged in the vicinity of a first quartz block and a second quartz block, and a space inside a long chamber is annular. Plasma generated in the space inside the long chamber is jetted toward a base material from a plasma jetting port) as a slit-shaped opening in the long chamber. The base material is processed by relatively moving the long chamber and a base material holding mechanism holding the base material inside the annular chamber in a direction perpendicular to the longitudinal direction of the plasma jetting port.

Abstract: In a plasma torch unit, a conductor rod having a spiral shape is disposed inside a quartz pipe having a surface coated with boron glass, and a brass block is disposed on the periphery thereof. While a gas is being supplied into a cylindrical chamber, a high-frequency power is supplied to the conductor rod and a plasma is generated in the cylindrical chamber, so that a base material is irradiated with the plasma.

Abstract: In a plasma torch unit, a conductor rod having a spiral shape is disposed inside a quartz pipe having a surface coated with boron glass, and a brass block is disposed on the periphery thereof. While a gas is being supplied into a cylindrical chamber, a high-frequency power is supplied to the conductor rod and a plasma is generated in the cylindrical chamber, so that a base material is irradiated with the plasma.