Patents by Inventor Taro Otokake

Taro Otokake has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for measuring pattern positions
    Patent number: 5539521
    Abstract: A pattern position measuring method of measuring two-dimensional positions of a hyperfine pattern formed on the surface of a substrate.
    Type: Grant
    Filed: September 7, 1995
    Date of Patent: July 23, 1996
    Assignee: Nikon Corporation
    Inventors: Taro Otokake, Takashi Endo, Hisao Izawa, Kazuhiro Takaoka