Patents by Inventor Taro Sugihara

Taro Sugihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10222708
    Abstract: An exposure method and apparatus expose a substrate with illumination light via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A second stage on which the substrate is held and a third stage are relatively moved, based on outer periphery positional information of the second stage, in order to cause the second stage to come close, from one side in a first direction, to the third stage that faces the projection optical system. The second and third stages that have come close together are moved from the one side to an other side in the first direction with respect to the projection optical system to place the second stage to face the projection optical system instead of the third stage while substantially maintaining the liquid immersion area under the projection optical system.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: March 5, 2019
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20180081283
    Abstract: An exposure method and apparatus expose a substrate with illumination light via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A second stage on which the substrate is held and a third stage are relatively moved, based on outer periphery positional information of the second stage, in order to cause the second stage to come close, from one side in a first direction, to the third stage that faces the projection optical system. The second and third stages that have come close together are moved from the one side to an other side in the first direction with respect to the projection optical system to place the second stage to face the projection optical system instead of the third stage while substantially maintaining the liquid immersion area under the projection optical system.
    Type: Application
    Filed: November 28, 2017
    Publication date: March 22, 2018
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Patent number: 9857692
    Abstract: An exposure method and apparatus exposes an object with an exposure beam via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A first stage on which the object is held and a second stage are moved relative to each other so that the second stage approaches the first stage that is placed facing the projection optical system, the second stage having an upper surface contactable with a liquid immersion area. The first and second stages that have approached each other are moved with respect to the projection optical system so that the second stage is placed facing the projection optical system instead of the first stage. For relative movement of the first and second stages in the approaching, driving of the first and second stages is controlled based on outer periphery positional information of the first stage.
    Type: Grant
    Filed: February 17, 2016
    Date of Patent: January 2, 2018
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20160161861
    Abstract: An exposure method and apparatus exposes an object with an exposure beam via a projection optical system and a liquid of a liquid immersion area formed under the projection optical system. A first stage on which the object is held and a second stage are moved relative to each other so that the second stage approaches the first stage that is placed facing the projection optical system, the second stage having an upper surface contactable with a liquid immersion area. The first and second stages that have approached each other are moved with respect to the projection optical system so that the second stage is placed facing the projection optical system instead of the first stage. For relative movement of the first and second stages in the approaching, driving of the first and second stages is controlled based on outer periphery positional information of the first stage.
    Type: Application
    Filed: February 17, 2016
    Publication date: June 9, 2016
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Patent number: 9348238
    Abstract: An exposure apparatus exposes an object with an exposure beam. The apparatus includes first and second stages, a measurement device and a controller. The first stage mounts the object. The second stage is movable relative to the first stage. The measurement device obtains position information of an outer periphery edge of the first stage. The controller controls at least one of a position of the first stage and a position of the second stage based on the position information of the outer periphery edge so that the first and second stages do not touch each other.
    Type: Grant
    Filed: August 12, 2013
    Date of Patent: May 24, 2016
    Assignee: NIKO CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Patent number: 9298108
    Abstract: An exposure method and apparatus exposes a substrate that is loaded on a stage via a carrier system, with an exposure beam via a projection optical system and a liquid. An object carried by the carrier system is mounted in a depressed section of the stage. Information on a positional relation between the object mounted in the depressed section and the depressed section is obtained. The substrate is loaded on the stage based on the obtained information so that the substrate carried to above the stage by the carrier system is mounted in the depressed section. A part of the substrate mounted in the depressed section is irradiated with the exposure beam via the projection optical system and a liquid immersion area formed by the liquid under the projection optical system.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: March 29, 2016
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20160018745
    Abstract: An exposure method and apparatus exposes a substrate that is loaded on a stage via a carrier system, with an exposure beam via a projection optical system and a liquid. An object carried by the carrier system is mounted in a depressed section of the stage. Information on a positional relation between the object mounted in the depressed section and the depressed section is obtained. The substrate is loaded on the stage based on the obtained information so that the substrate carried to above the stage by the carrier system is mounted in the depressed section. A part of the substrate mounted in the depressed section is irradiated with the exposure beam via the projection optical system and a liquid immersion area formed by the liquid under the projection optical system.
    Type: Application
    Filed: September 29, 2015
    Publication date: January 21, 2016
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Patent number: 9223230
    Abstract: A loading method and apparatus loads an object via a carrier system in an exposure apparatus that exposes the object with an exposure beam via a projection optical system and a liquid. Position information of the depressed section is obtained by detecting a part of a stage that mounts the object in a depressed section placed at a part of an upper surface of the stage. The carrier system carries the object to above the stage placed at an exchange position of the object, the exchange position being distanced from the projection optical system. The object is loaded on the stage based on the position information of the depressed section so that the carried object is mounted in the depressed section.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: December 29, 2015
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Patent number: 9223231
    Abstract: An exposure method and apparatus exposes a substrate that is loaded on a stage via a carrier system, with an exposure beam via a projection optical system and a liquid. An object carried by the carrier system is mounted in a depressed section of the stage. Information on a positional relation between the object mounted in the depressed section and the depressed section is obtained. The substrate is loaded on the stage based on the obtained information so that the substrate carried to above the stage by the carrier system is mounted in the depressed section. A part of the substrate mounted in the depressed section is irradiated with the exposure beam via the projection optical system and a liquid immersion area formed by the liquid under the projection optical system.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: December 29, 2015
    Assignee: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20130329200
    Abstract: An exposure apparatus exposes an object with an exposure beam. The apparatus includes first and second stages, a measurement device and a controller. The first stage mounts the object. The second stage is movable relative to the first stage. The measurement device obtains position information of an outer periphery edge of the first stage. The controller controls at least one of a position of the first stage and a position of the second stage based on the position information of the outer periphery edge so that the first and second stages do not touch each other.
    Type: Application
    Filed: August 12, 2013
    Publication date: December 12, 2013
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Publication number: 20130329201
    Abstract: A loading method and apparatus loads an object via a carrier system in an exposure apparatus that exposes the object with an exposure beam via a projection optical system and a liquid. Position information of the depressed section is obtained by detecting a part of a stage that mounts the object in a depressed section placed at a part of an upper surface of the stage. The carrier system carries the object to above the stage placed at an exchange position of the object, the exchange position being distanced from the projection optical system. The object is loaded on the stage based on the position information of the depressed section so that the carried object is mounted in the depressed section.
    Type: Application
    Filed: August 13, 2013
    Publication date: December 12, 2013
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Publication number: 20130329208
    Abstract: An exposure method and apparatus exposes a substrate that is loaded on a stage via a carrier system, with an exposure beam via a projection optical system and a liquid. An object carried by the carrier system is mounted in a depressed section of the stage. Information on a positional relation between the object mounted in the depressed section and the depressed section is obtained. The substrate is loaded on the stage based on the obtained information so that the substrate carried to above the stage by the carrier system is mounted in the depressed section. A part of the substrate mounted in the depressed section is irradiated with the exposure beam via the projection optical system and a liquid immersion area formed by the liquid under the projection optical system.
    Type: Application
    Filed: August 13, 2013
    Publication date: December 12, 2013
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Patent number: 8576379
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Grant
    Filed: February 5, 2010
    Date of Patent: November 5, 2013
    Assignee: Nikon Corporation
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Patent number: 8072578
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Grant
    Filed: February 19, 2008
    Date of Patent: December 6, 2011
    Assignee: Nikon Corporation
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Patent number: 8059260
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Grant
    Filed: November 18, 2005
    Date of Patent: November 15, 2011
    Assignee: Nikon Corporation
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Patent number: 8054465
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Grant
    Filed: February 19, 2008
    Date of Patent: November 8, 2011
    Assignee: Nikon Corporation
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20100134779
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Application
    Filed: February 5, 2010
    Publication date: June 3, 2010
    Applicant: NIKON CORPORATION
    Inventors: Masahiko YASUDA, Taro SUGIHARA
  • Publication number: 20090213347
    Abstract: A loading/unloading apparatus and method to perform quickly exchanging article to be loaded on a placing table.
    Type: Application
    Filed: October 18, 2006
    Publication date: August 27, 2009
    Inventor: Taro Sugihara
  • Publication number: 20080151257
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Application
    Filed: February 19, 2008
    Publication date: June 26, 2008
    Applicant: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara
  • Publication number: 20080151267
    Abstract: A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
    Type: Application
    Filed: February 19, 2008
    Publication date: June 26, 2008
    Applicant: NIKON CORPORATION
    Inventors: Masahiko Yasuda, Taro Sugihara