Abstract: A movement error detection apparatus includes a plurality of marks including a fifth mark (movable region inside mark) arranged in a movable region of a movable conveyor and first to fourth marks (movable region outside marks) arranged outside the movable region of the movable conveyor; a substrate recognition camera (imaging device to move together with a mounting head to image the first to fifth marks; and a projection device (auxiliary device) to assist an imaging. The first to fourth marks are arranged on a horizontal reference plane including a substrate, and the fifth mark is arranged at a position which is lower than the horizontal reference plane and at which the movable conveyor is not interfered. The projection device absorbs a height difference between the fifth mark and the horizontal reference plane to assist the substrate recognition camera in picking up a focused image of the fifth mark.

Abstract: A movement error detection apparatus includes a movable region inside mark made of a projected image arranged in a movable region of a movable conveyor of each of first and second substrate conveyance devices; and a pair of movable region outside marks respectively provided on both sides of the movable region inside mark and arranged at a position outside the movable region of the movable conveyor and outward of a substrate at a work position; an imaging device which moves together with a mounting head; and a control device that selects two marks, among the marks, which are positioned on both outer sides of the substrate and are closest to the substrate, and causes the first substrate recognition camera to image the marks, as well as obtaining a movement error of the first mounting head on the basis of the two mark images.

Abstract: A movement error detection apparatus includes a plurality of marks including a fifth mark (movable region inside mark) arranged in a movable region of a movable conveyor and first to fourth marks (movable region outside marks) arranged outside the movable region of the movable conveyor; a substrate recognition camera (imaging device to move together with a mounting head to image the first to fifth marks; and a projection device (auxiliary device) to assist an imaging. The first to fourth marks are arranged on a horizontal reference plane including a substrate, and the fifth mark is arranged at a position which is lower than the horizontal reference plane and at which the movable conveyor is not interfered. The projection device absorbs a height difference between the fifth mark and the horizontal reference plane to assist the substrate recognition camera in picking up a focused image of the fifth mark.

Abstract: A movement error detection apparatus includes a movable region inside mark made of a projected image arranged in a movable region of a movable conveyor of each of first and second substrate conveyance devices; and a pair of movable region outside marks respectively provided on both sides of the movable region inside mark and arranged at a position outside the movable region of the movable conveyor and outward of a substrate at a work position; an imaging device which moves together with a mounting head; and a control device that selects two marks, among the marks, which are positioned on both outer sides of the substrate and are closest to the substrate, and causes the first substrate recognition camera to image the marks, as well as obtaining a movement error of the first mounting head on the basis of the two mark images.