Abstract: A polarization split element 1 includes a substrate 2 and a plurality of ridge-shaped convex portions 3 provided in parallel with one another at equal intervals on the substrate 2, and performs polarization splitting with respect to light beams 4 incident to the plurality of the convex portions 3 by diffraction. This polarization split element 1 satisfies a conditional expression represented by: 1.6?n?2.2 and 0.6?P/??0.

Abstract: A transmissive diffraction grating includes a substrate and a plurality of ridges provided in a mutually parallel manner at constant periodicity p on the substrate. The ridges include a first layer, a second layer (refractive index n2: 2.0-2.5), and a third layer with non-continuous refractive indices, arranged in that order from the substrate outward. The first layer adjacent the substrate, in terms of its refractive index, exhibits a difference of 0.1 or less relative to the substrate. The second layer has a higher refractive index than the first layer and third layer and satisfies the following conditions. For a single ridge, the cross-sectional area S of a cross-section of the second layer perpendicular to the longitudinal direction of said ridge is in the range of 0.75p2k1?2/(n2?1)<S<1.20p2k1?2/(n2?1), were, ? is the angle of incidence onto the diffraction grating face, expressed in radian units, and the constant k1 is 1.1. The thickness d2 of the second layer is in the range of 0.

Abstract: An optical element of the present invention includes a structure having at least one convex portion and at least one concave portion formed so as to be adjacent to either one of the convex portions. At least one surface of the structure is covered, and the optical element has a hollow portion. At least one surface of the structure is covered with a covering layer formed by a deposition process.

Abstract: A wavelength separator includes a one-dimensional photonic crystal structure formed by providing a plurality of grooves in parallel with one another at uniform intervals in a homogeneous medium, and has an incident end face formed obliquely with respect to a direction in which the grooves extend, and an output end face formed approximately perpendicular to the incident end face.

Abstract: A spectrometer using a diffraction grating includes a light-incident portion including an incident-side optical waveguide emitting a light beam that includes a plurality of wavelength components and that approximates a Gaussian beam, and a collimating lens that is arranged on an emission side of the incident-side optical waveguide and that converts the light beam approximating a Gaussian beam that is emitted from the incident-side optical waveguide into a substantially collimated light beam; a diffraction grating having grooves on its surface, on which the light beam that has been converted into the substantially collimated light beam by the collimating lens is incident, the diffraction grating spectrally separating the light beam by emitting light beams whose emission direction depends on their wavelength; and a light-emitting portion having a plurality of focusing lenses that respectively condense the light beams that have been spectrally separated by the diffraction grating.

Abstract: An optical element according to the invention constituted by a multilayer structure having a periodic structural portion as at least one region constituted by repetition of a predetermined period, wherein an end surface of the multilayer structure not parallel to layer surfaces of the multilayer structure is used as a light input surface whereas one or each of opposite surfaces of the multilayer structure parallel to the layer surfaces is used as a light output surface. There is an intermediate layer between a medium and a surface of the multilayer structure, the intermediate layer having a refractive index less than the refractive index of the medium. The periodic structural portion of the multilayer structure can be regarded as a one-dimensional photonic crystal. Refracted light from the one-dimensional photonic crystal has good directivity and the direction of the refracted light has strong dependence on wavelength.

Abstract: A method of forming a micro groove structure according to the invention has the steps of: (a) forming a mask pattern on a substrate capable of being subjected to dry etching; (b) dry etching the substrate having the mask pattern formed thereon; (c) vapor-phase forming a thin film of a masking material for the dry etching, on a non-etched surface portion of the substrate after the dry etching; and (d) dry etching the substrate having the thin film formed thereon. The steps (a) to (d) are carried out successively.

Abstract: A spectrometer using a diffraction grating includes a light-incident portion including an incident-side optical waveguide emitting a light beam that includes a plurality of wavelength components and that approximates a Gaussian beam, and a collimating lens that is arranged on an emission side of the incident-side optical waveguide and that converts the light beam approximating a Gaussian beam that is emitted from the incident-side optical waveguide into a substantially collimated light beam; a diffraction grating having grooves on its surface, on which the light beam that has been converted into the substantially collimated light beam by the collimating lens is incident, the diffraction grating spectrally separating the light beam by emitting light beams whose emission direction depends on their wavelength; and a light-emitting portion having a plurality of focusing lenses that respectively condense the light beams that have been spectrally separated by the diffraction grating.

Abstract: A wavelength separator includes a one-dimensional photonic crystal structure formed by providing a plurality of grooves in parallel with one another at uniform intervals in a homogeneous medium, and has an incident end face formed obliquely with respect to a direction in which the grooves extend, and an output end face formed approximately perpendicular to the incident end face.

Abstract: An optical element according to the invention uses a thin film-like two-dimensional photonic crystal having a structure of periodic repetition in two directions perpendicular to each other. When the two periodic directions are Y-axis and Z-axis directions, opposite surfaces of the photonic crystal structure perpendicular to the Z-axis direction and parallel to the Y-axis direction are used as a light input surface and a light output surface respectively. The direction of movement of light rays incident onto the light input surface is decided so that it is parallel to the YZ plane and inclined at a predetermined inclination angle to the Z-axis direction.

Abstract: Two lenses are used for forming a collimator parallel pair, in which the distance between the two lenses is substantially made coincident with the maximum distance allowing beam waists to be formed at equal distances from the two lenses respectively.

Abstract: An optical element of the present invention includes a structure having at least one convex portion and at least one concave portion formed so as to be adjacent to either one of the convex portions. At least one surface of the structure is covered, and the optical element has a hollow portion. At least one surface of the structure is covered with a covering layer formed by a deposition process.

Abstract: An optical element according to the invention uses a thin film-like two-dimensional photonic crystal having a structure of periodic repetition in two directions perpendicular to each other. When the two periodic directions are Y-axis and Z-axis directions, opposite surfaces of the photonic crystal structure perpendicular to the Z-axis direction and parallel to the Y-axis direction are used as a light input surface and a light output surface respectively. The direction of movement of light rays incident onto the light input surface is decided so that it is parallel to the YZ plane and inclined at a predetermined inclination angle to the Z-axis direction.

Abstract: A method of forming a micro groove structure according to the invention has the steps of: (a) forming a mask pattern on a substrate capable of being subjected to dry etching; (b) dry etching the substrate having the mask pattern formed thereon; (c) vapor-phase forming a thin film of a masking material for the dry etching, on a non-etched surface portion of the substrate after the dry etching; and (d) dry etching the substrate having the thin film formed thereon. The steps (a) to (d) are carried out successively.

Abstract: An optical element according to the invention constituted by a multilayer structure having a periodic structural portion as at least one region constituted by repetition of a predetermined period, wherein an end surface of the multilayer structure not parallel to layer surfaces of the multilayer structure is used as a light input surface whereas one or each of opposite surfaces of the multilayer structure parallel to the layer surfaces is used as a light output surface. The periodic structural portion of the multilayer structure can be regarded as a one-dimensional photonic crystal. Refracted light from the one-dimensional photonic crystal has good directivity and the direction of the refracted light has strong dependence on wavelength. When this wavelength dependence property is used, a spectroscopic device or a polarized light separating device of high resolution can be achieved without increase in device size.

Abstract: Two lenses are used for forming a collimator parallel pair, in which the distance between the two lenses is substantially made coincident with the maximum distance allowing beam waists to be formed at equal distances from the two lenses respectively.

Abstract: In an optical device using an end surface of a periodic multilayer structure as a beam incidence surface or a beam exit surface, a high-resolving-power spectroscopic apparatus can be achieved without increase in size of the apparatus and by use of good directivity of beam leaked from the periodic multilayer structure and strong wavelength dependence of the angle of the leaked beam. Particularly, by disposing layer surfaces of the multilayer structure perpendicularly to a substrate, optical devices suitable for integration of the devices can be formed.

Abstract: An optical device in which an end surface of a periodic multilayer structure is provided as a beam incidence surface or as a beam exit surface. The optical device can realize a high resolving-power spectroscopic apparatus without having any increase in size of the apparatus and by use of good directivity of beam leaked from the multilayer structure and strong wavelength dependence of an angle of the leaked beam.