Abstract: A collimated beam (23) of a surface acoustic wave propagates on a piezoelectric substrate (22) while passing through sensitive film (25) to adsorb a sensing gas. Signal processing unit (40) transmits an exciting burst signal to sensor electrode (24) to excite the collimated beam (23), receives first and second returned burst signals after the collimated beam (23) has propagated, and calculates a target gas parameter by a target leakage factor of the background gas and a relation between reference gas parameters and reference leakage factors of reference gases, the leakage factor is provided by first and second attenuations of the first and second returned burst signals, respectively, using waveform data of the first and second returned burst signals.

Abstract: A standard-moisture generator includes a flow controller configured to control a flow of a gas, a dryer connected to the flow controller, configured to absorb water molecules in the gas and to generate a dry gas having a background moisture, a moisture cell connected to the dryer, configured to add an object moisture to the dry gas, and a delay member connected to the moisture cell, configured to pass the dry gas with a delay time depending on a concentration of the background moisture in the dry gas.

Abstract: A system for calibrating a moisture sensor encompasses a processing unit (341). The processing unit (341) includes a reference data obtaining LCKT (345), a subject data obtaining LCKT (346) and a relationship calculating LCKT (347). The reference data obtaining LCKT (345) obtains reference data, after injecting water-vapor with known concentrations into an analyzer. The subject data obtaining LCKT (346) measures subject data indicating temporal variation of output-responses of a subject sensor element of the analyzer under test. The relationship calculating LCKT (347) compares the subject data with the reference data, and calculates relationships between the output-responses of the subject sensor element and the known concentrations.

Abstract: A standard-moisture generator includes a flow controller configured to control a flow of a gas, a dryer connected to the flow controller, configured to absorb water molecules in the gas and to generate a dry gas having a background moisture, a moisture cell connected to the dryer, configured to add an object moisture to the dry gas, and a delay member connected to the moisture cell, configured to pass the dry gas with a delay time depending on a concentration of the background moisture in the dry gas.

Abstract: A collimated beam (23) of a surface acoustic wave propagates on a piezoelectric substrate (22) while passing through sensitive film (25) to adsorb a sensing gas. Signal processing unit (40) transmits an exciting burst signal to sensor electrode (24) to excite the collimated beam (23), receives first and second returned burst signals after the collimated beam (23) has propagated, and calculates a target gas parameter by a target leakage factor of the background gas and a relation between reference gas parameters and reference leakage factors of reference gases, the leakage factor is provided by first and second attenuations of the first and second returned burst signals, respectively, using waveform data of the first and second returned burst signals.