Abstract: A vacuum valve comprises: a housing configured such that a flow path of gas passing through a pair of opposing openings is formed; a valve body; a sealing body; a sealing body drive section configured to drive the sealing body in upstream and downstream directions of the gas; and a mechanical stopper including a restriction section configured to inhibit, at a restriction position, movement of the sealing body in the gas downstream direction. The mechanical stopper is disposed movable to a selected one of a first position at which movement of the sealing body toward a gas downstream side is inhibited at the restriction position or a second position at which movement of the sealing body from the restriction position to a non-restriction position on the gas downstream side is allowed.

Abstract: A vacuum valve comprises: a housing configured such that a flow path of gas passing through a pair of opposing openings is formed; a valve body; a sealing body; a sealing body drive section configured to drive the sealing body in upstream and downstream directions of the gas; and a mechanical stopper including a restriction section configured to inhibit, at a restriction position, movement of the sealing body in the gas downstream direction. The mechanical stopper is disposed movable to a selected one of a first position at which movement of the sealing body toward a gas downstream side is inhibited at the restriction position or a second position at which movement of the sealing body from the restriction position to a non-restriction position on the gas downstream side is allowed.

Abstract: A slide valve comprises: a casing having a pair of facing flow channels; a slide plate inserted into and removed from a space between the flow channels; and an annular sealing body slidingly moving in a facing direction of the flow channels inside the casing and coming into contact with the slide plate inserted between the flow channels to bring the slide valve into a closed state. A first sealing member sealing a gap between the sealing body and the inner peripheral wall surface is disposed on an inner peripheral surface of the annular sealing body and a second sealing member sealing a gap between the sealing body and the outer peripheral wall surface is formed on an outer peripheral surface of the annular sealing body.

Abstract: A vacuum valve includes a valve opening and a valve plate that opens and closes the valve opening. A part of an edge of the valve opening is a wedge edge portion having a wedge shape projected outward. The wedge edge portion is provided in a region where the valve plate starts to open the valve opening when the valve plate is moved to open the valve opening.

Abstract: A vacuum valve includes a valve opening and a valve plate that opens and closes the valve opening. A part of an edge of the valve opening is a wedge edge portion having a wedge shape projected outward. The wedge edge portion is provided in a region where the valve plate starts to open the valve opening when the valve plate is moved to open the valve opening.

Abstract: A slide valve comprises: a casing having a pair of facing flow channels; a slide plate inserted into and removed from a space between the flow channels; and an annular sealing body slidingly moving in a facing direction of the flow channels inside the casing and coming into contact with the slide plate inserted between the flow channels to bring the slide valve into a closed state. A first sealing member sealing a gap between the sealing body and the inner peripheral wall surface is disposed on an inner peripheral surface of the annular sealing body and a second sealing member sealing a gap between the sealing body and the outer peripheral wall surface is formed on an outer peripheral surface of the annular sealing body.

Abstract: A laser crystallization apparatus and a crystallization method with a high throughput are provided. Laser light having a predetermined light intensity distribution is irradiated to a semiconductor film to melt and crystallize, wherein a irradiation position is placed very quickly and with a high positional accuracy, thereby forming the semiconductor film having a large crystal grain size. A laser crystallization apparatus according to one aspect of the present invention comprises a crystallizing laser light source, a phase shifter modulating pulse laser light to have the predetermined light intensity distribution, an excimer imaging optical system, a substrate holding stage mounting a processing substrate and continuously moving in the predetermined direction, a position measuring means, and a signal generating means indicating generation of the pulse laser light based on the position measurement of the stage by the position measuring means.

Abstract: A laser crystallization apparatus and a crystallization method with a high throughput are provided. Laser light having a predetermined light intensity distribution is irradiated to a semiconductor film to melt and crystallize, wherein a irradiation position is positioned very quickly and with a high positional accuracy, thereby forming the semiconductor film having a large crystal grain size. A laser crystallization apparatus according to one aspect of the present invention comprises a laser light source, a phase shifter modulating laser light to give a predetermined light intensity distribution, marks provided on the substrate, a substrate holding stage moving in a predetermined direction, mark measuring means measuring a time at which the mark passes a predetermined position, and signal generating means generating a trigger signal indicating the irradiation of the laser light based on the measured time.

Abstract: A laser crystallization apparatus and a crystallization method with a high throughput are provided. Laser light having a predetermined light intensity distribution is irradiated to a semiconductor film to melt and crystallize, wherein a irradiation position is placed very quickly and with a high positional accuracy, thereby forming the semiconductor film having a large crystal grain size. A laser crystallization apparatus according to one aspect of the present invention comprises a crystallizing laser light source, a phase shifter modulating pulse laser light to have the predetermined light intensity distribution, an excimer imaging optical system, a substrate holding stage mounting a processing substrate and continuously moving in the predetermined direction, a position measuring means, and a signal generating means indicating generation of the pulse laser light based on the position measurement of the stage by the position measuring means.

Abstract: A laser crystallization apparatus and a crystallization method with a high throughput are provided. Laser light having a predetermined light intensity distribution is irradiated to a semiconductor film to melt and crystallize, wherein a irradiation position is positioned very quickly and with a high positional accuracy, thereby forming the semiconductor film having a large crystal grain size. A laser crystallization apparatus according to one aspect of the present invention comprises a laser light source, a phase shifter modulating laser light to give a predetermined light intensity distribution, marks provided on the substrate, a substrate holding stage moving in a predetermined direction, mark measuring means measuring a time at which the mark passes a predetermined position, and signal generating means generating a trigger signal indicating the irradiation of the laser light based on the measured time.

Abstract: A granular liquid crystal of uniform grain diameter is discharged from a liquid crystal application unit. A charged plate ionizes the discharged granular liquid crystal. A power source supplies a plus voltage to the charged plate via a switch which turns on or off a supplied voltage from the power source. If the switch is turned on, the granular liquid crystal is ionized, and the ionized granular liquid crystal is deflected by a deflecting plate to reach a substrate. On the other hand, if the switch is turned off, the granular liquid crystal is not ionized, and not deflected by the deflecting plate to be captured by a garter. The switch is turned on or off in synchronism with the frequency of the piezoelectric transducer, whereby a desired amount of liquid crystal can be dripped on the substrate.

Abstract: A granular liquid crystal of uniform grain diameter is discharged from a liquid crystal application unit. A charged plate ionizes the discharged granular liquid crystal. A power source supplies a plus voltage to the charged plate via a switch which turns on or off a supplied voltage from the power source. If the switch is turned on, the granular liquid crystal is ionized, and the ionized granular liquid crystal is deflected by a deflecting plate to reach a substrate. On the other hand, if the switch is turned off, the granular liquid crystal is not ionized, and not deflected by the deflecting plate to be captured by a garter. The switch is turned on or off in synchronism with the frequency of the piezoelectric transducer, whereby a desired amount of liquid crystal can be dripped on the substrate.