Abstract: Disclosed is a substrate treating apparatus that performs a heat treatment to a substrate. The apparatus includes the following elements: a heat treating plate; a casing that produces a heat treatment atmosphere by the heat treating plate; a movable top board that is movable between a ceiling surface of the casing and the heat treating plate; and a controller that causes the movable top board to be moved to a raised position when the substrate is loaded/unloaded, and causes the movable top board to be moved to a lowered position when the substrate is placed on the heat treating plate for performing the heat treatment, thereby controlling the lowered position for every substrate.

Abstract: Disclosed is a substrate treating apparatus that performs a heat treatment to a substrate. The apparatus includes the following elements: a heat treating plate that heats the substrate; lift pins that deliver the substrate, a lift pin drive mechanism that causes the lift pins to move upwardly/downwardly; a casing that produces a heat treatment atmosphere; and a cooling base plate that suppresses transmission of heat from the heat treating plate. The lift pin drive mechanism is disposed below the cooling base plate.

Abstract: Disclosed is a substrate treating apparatus that performs a heat treatment to a substrate. The apparatus includes the following elements: a heat treating plate; a casing that produces a heat treatment atmosphere by the heat treating plate; a movable top board that is movable between a ceiling surface of the casing and the heat treating plate; and a controller that causes the movable top board to be moved to a raised position when the substrate is loaded/unloaded, and causes the movable top board to be moved to a lowered position when the substrate is placed on the heat treating plate for performing the heat treatment, thereby controlling the lowered position for every substrate.

Abstract: Disclosed is a substrate treating apparatus that performs a heat treatment to a substrate. The apparatus includes the following elements: a heat treating plate that heats the substrate; lift pins that deliver the substrate, a lift pin drive mechanism that causes the lift pins to move upwardly/downwardly; a casing that produces a heat treatment atmosphere; and a cooling base plate that suppresses transmission of heat from the heat treating plate. The lift pin drive mechanism is disposed below the cooling base plate.

Abstract: A floating unit comprises: a stationary portion; a movable portion supported to be movable relative to the stationary portion and including an article support; a support disposed between the stationary portion and the movable portion, the support having a plurality of rolling elements rotatably held by a holder between an upwardly facing first contact surface provided on the stationary portion and a downwardly facing second contact surface provided on the movable portion, whereby the support is movable in all horizontal directions relative to the movable portion and the stationary portion; a movable portion returning device for biasing the movable portion relative to the stationary portion toward a reference position for receiving an article; and a support returning device for biasing the support horizontally relative to the stationary portion toward a reference position for holding the movable portion.

Abstract: A floating unit comprises: a stationary portion; a movable portion supported to be movable relative to the stationary portion and including an article support; a support disposed between the stationary portion and the movable portion, the support having a plurality of rolling elements rotatably held by a holder between an upwardly facing first contact surface provided on the stationary portion and a downwardly facing second contact surface provided on the movable portion, whereby the support is movable in all horizontal directions relative to the movable portion and the stationary portion; a movable portion returning device for biasing the movable portion relative to the stationary portion toward a reference position for receiving an article; and a support returning device for biasing the support horizontally relative to the stationary portion toward a reference position for holding the movable portion.