Patents by Inventor Tatsunori IZUMI

Tatsunori IZUMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer edge polishing apparatus and method
    Patent number: 11559869
    Abstract: A wafer edge polishing apparatus includes a cleaning mechanism exhibiting a superb effect of cleaning slurry residue adhered on a chuck table. This edge polishing device is provided with: a chuck table which sucks/holds a wafer; a rotation drive mechanism which rotates the chuck table; an edge polishing unit which polishes an edge of the wafer while supplying slurry to the wafer, which is rotating while being sucked/held by the chuck table; and a cleaning unit which removes slurry residue on the chuck table. The cleaning unit includes a cleaning head, and cleans the chuck table through high-pressure cleaning and brush-cleaning by using the cleaning head, wherein the cleaning head is provided with a high-pressure jet nozzle and a brush surrounding the periphery of the high-pressure jet nozzle.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: January 24, 2023
    Assignee: SUMCO CORPORATION
    Inventors: Makoto Ando, Tatsunori Izumi, Ryuichi Tanimoto, Yuhei Matsunaga, Yasuo Yamada
  • WAFER EDGE POLISHING APPARATUS AND METHOD
    Publication number: 20190299354
    Abstract: A wafer edge polishing apparatus includes a cleaning mechanism exhibiting a superb effect of cleaning slurry residue adhered on a chuck table. This edge polishing device is provided with: a chuck table which sucks/holds a wafer; a rotation drive mechanism which rotates the chuck table; an edge polishing unit which polishes an edge of the wafer while supplying slurry to the wafer, which is rotating while being sucked/held by the chuck table; and a cleaning unit which removes slurry residue on the chuck table. The cleaning unit includes a cleaning head, and cleans the chuck table through high-pressure cleaning and brush-cleaning by using the cleaning head, wherein the cleaning head is provided with a high-pressure jet nozzle and a brush surrounding the periphery of the high-pressure jet nozzle.
    Type: Application
    Filed: October 2, 2017
    Publication date: October 3, 2019
    Applicant: SUMCO Corporation
    Inventors: Makoto ANDO, Tatsunori IZUMI, Ryuichi TANIMOTO, Yuhei MATSUNAGA, Yasuo YAMADA