Patents by Inventor Tatsuo KUSUMOTO

Tatsuo KUSUMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Susceptor, vapor deposition apparatus, vapor deposition method and epitaxial silicon wafer
    Patent number: 10490437
    Abstract: A disc-shaped susceptor includes a plurality of recesses that are aligned in a circumferential direction on an upper surface of the susceptor and in which wafers are respectively mounted, in which the susceptor is formed so that a center of the susceptor is concave toward a lower surface thereof from an outer edge thereof.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: November 26, 2019
    Assignee: SUMCO CORPORATION
    Inventors: Daisuke Hieda, Hisashi Uchino, Tatsuo Kusumoto
  • SUSCEPTOR, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND EPITAXIAL SILICON WAFER
    Publication number: 20160300753
    Abstract: A disc-shaped susceptor includes a plurality of recesses that are aligned in a circumferential direction on an upper surface of the susceptor and in which wafers are respectively mounted, in which the susceptor is formed so that a center of the susceptor is concave toward a lower surface thereof from an outer edge thereof.
    Type: Application
    Filed: April 1, 2016
    Publication date: October 13, 2016
    Applicant: SUMCO CORPORATION
    Inventors: Daisuke HIEDA, Hisashi UCHINO, Tatsuo KUSUMOTO