Abstract: Provided is a three-dimensional powder bed fusion additive manufacturing (PBF-AM) apparatus including a base plate, a regulating member configured to level powder supplied onto the base plate by moving over the base plate at a height position keeping a predetermined interval from a surface of the base plate to form a powder layer, and a controller configured to control movement of the regulating member, in which an input unit for inputting manufacturing data is included, and the controller causes the regulating member to move at a moving speed based on the manufacturing data input from the input unit.

Abstract: A three-dimensional PBF-AM apparatus includes a stage on which a powder material is spread, and a tubular build box disposed in a state of surrounding the stage. The build box includes a side wall portion having a first tubular member surrounding the stage and a second tubular member surrounding the stage with the first tubular member interposed therebetween and forming a space with the first tubular member, and moreover, a vacuum heat insulating layer can be formed inside the side wall portion by vacuuming the space.

Abstract: An additive manufacturing machine is provided which can smooth out powdered material while preventing mechanical interference between a smoothing plate and a manufacturing box. The additive manufacturing machine has a support stage, a manufacturing box, and a powder feeder mechanism. The powder feeder mechanism feeds powdered material onto the support stage and smooths out the powdered material. The powder feeder mechanism has an arm portion, a guide mechanism, a connective portion, and a drive mechanism. The guide mechanism is secured to the manufacturing box and supports the arm portion such that it can move in a first direction. The connective portion is connected to the arm portion and transmits force to the arm portion only in the first direction. The drive mechanism is secured to a support member different from the manufacturing box and has a drive portion for moving the connective portion in the first direction.

Abstract: A vacuum pump that evacuates an inside of a vacuum chamber and powder capturing devices disposed on an intake side of the vacuum pump are included. The powder capturing devices include a plurality of flow path forming units that form a continuous gas flow path from an intake unit located on the vacuum chamber side to an exhaust unit located on the vacuum pump side. The plurality of flow path forming units include a first flow path forming unit having a first catching unit that causes the powder sucked from the intake unit to collide and then catch the powder, and a second flow path forming unit having a second catching unit that causes the powder passing through the first flow path forming unit to collide and then catch the powder.

Abstract: A three-dimensional PBF-AM apparatus includes a stage on which a powder material is spread, and a tubular build box disposed in a state of surrounding the stage. The build box includes a side wall portion having a first tubular member surrounding the stage and a second tubular member surrounding the stage with the first tubular member interposed therebetween and forming a space with the first tubular member, and moreover, a vacuum heat insulating layer can be formed inside the side wall portion by vacuuming the space.

Abstract: An additive manufacturing machine is provided which can smooth out powdered material while preventing mechanical interference between a smoothing plate and a manufacturing box. The additive manufacturing machine has a support stage, a manufacturing box, and a powder feeder mechanism. The powder feeder mechanism feeds powdered material onto the support stage and smooths out the powdered material. The powder feeder mechanism has an arm portion, a guide mechanism, a connective portion, and a drive mechanism. The guide mechanism is secured to the manufacturing box and supports the arm portion such that it can move in a first direction. The connective portion is connected to the arm portion and transmits force to the arm portion only in the first direction. The drive mechanism is secured to a support member different from the manufacturing box and has a drive portion for moving the connective portion in the first direction.

Abstract: There is provided an objective lens capable of reducing the effects of magnetic fields on a sample. The objective lens includes a first lens and a second lens. The lenses are arranged so that the component of the magnetic field of the first lens lying along the optical axis and the component of the magnetic field of the second lens lying along the optical axis cancel out each other at a sample placement surface. The first and second lenses each include an inner polepiece and an outer polepiece. The inner polepieces have front end portions, respectively. The outer polepieces have front end portions, respectively, which jut out toward the optical axis. The distances of the front end portions of the outer polepieces, respectively, from the sample placement surface are less than the distances of the front end portions of the inner polepieces, respectively, from the sample placement surface.

Abstract: There is provided an objective lens capable of reducing the effects of magnetic fields on a sample. The objective lens permits observation of the sample at high resolution. The objective lens (100) includes a first electromagnetic lens (10) and a second electromagnetic lens (20). The first and second lenses (10, 20) produce their respective magnetic fields including components lying along an optical axis (L), and are so arranged that the component of the magnetic field of the first lens (10) lying along the optical axis (L) and the component of the magnetic field of the second lens (20) lying along the optical axis (L) cancel out each other at a sample placement surface (2). The first lens (10) includes an inner polepiece (15) and an outer polepiece (16). Similarly, the second lens (20) includes an inner polepiece (25) and an outer polepiece (26). The inner polepieces (15, 25) have front end portions (15a, 25a), respectively.

Abstract: A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the present invention has: a sample container (10) that accommodates samples (S) and a refrigerant (6) for cooling the samples (S); an evacuated sample chamber (20); a sample exchange chamber (30) connected with the sample chamber (20); a partition valve (40) disposed between the sample exchange chamber (30) and the sample container (10); and vacuum pumping equipment (50) for evacuating the sample container (10). The sample container (10) can be connected with the sample exchange chamber (30) via the partition valve (40). The sample container (10) is evacuated by the vacuum pumping equipment (50) while the partition valve (40) is closed.

Abstract: A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the present invention has: a sample container (10) that accommodates samples (S) and a refrigerant (6) for cooling the samples (S); an evacuated sample chamber (20); a sample exchange chamber (30) connected with the sample chamber (20); a partition valve (40) disposed between the sample exchange chamber (30) and the sample container (10); and vacuum pumping equipment (50) for evacuating the sample container (10). The sample container (10) can be connected with the sample exchange chamber (30) via the partition valve (40). The sample container (10) is evacuated by the vacuum pumping equipment (50) while the partition valve (40) is closed.