Abstract: A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.

Abstract: A load port connected to a transport part includes: a base constituting a portion of a wall of the transport part; a stage on which a storage container is mounted; a stage driving mechanism configured to move the stage in a direction toward or away from the base; a door configured to be capable of opening/closing an opening of the base at a position facing a lid of the storage container mounted on the stage and to be capable of holding the lid disposed to face the opening in a state of closing the opening; a door driving mechanism configured to move the door between an opening position and a closing position; and a movement restricting part configured to restrict a movement of the stage in the direction away from the base by abutting against the stage.

Abstract: A load port for loading and unloading substrates between a transport chamber and a storage container includes: a plate-like portion constituting a wall surface of the transport chamber and including an opening in communication with an interior of the transport chamber; a stage configured to mount the storage container thereon such that a lid of the storage container faces a door of the opening; and a controller configured to control a driving device that moves the stage forward and rearward with respect to the plate-like portion, wherein the controller is further configured to control, when moving the stage toward the plate-like portion, the driving device to: apply a first thrust directed toward the plate-like portion to the stage until immediately before the stage reaches a predetermined position; and then apply a second thrust, which is greater than the first thrust and directed toward the plate-like portion, to the stage.

Abstract: There is provided a load port, including: a frame including an opening via which a transfer target object is capable of passing in a substantially horizontal posture; a load port door configured to engage with a container door capable of opening and closing a loading/unloading port of a storage container including slots capable of accommodating the transfer target object in a multi-stage manner, and to open and close the opening of the frame; and a mapping mechanism configured to map information on an accommodation state including presence or absence of the transfer target object in each of the slots in the storage container via the opening and the loading/unloading port.