Patents by Inventor Tatsushi Iimori

Tatsushi Iimori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090292388
    Abstract: An object of the present invention is to provide a semiconductor manufacturing system used for manufacturing a semiconductor in a semiconductor manufacturing facility according to a flow shop scheme. The semiconductor manufacturing system is provided with a plurality of bays having a plurality of pieces of semiconductor manufacturing equipment and intra-bay conveyance devices; an inter-bay conveyance device for conveying a carrier between the bays; and a flow shop controller, wherein each piece of semiconductor manufacturing equipment has one or more modules comprising a subsystem provided with at least one or more I/O devices; the bays, the semiconductor manufacturing equipment, the modules, the subsystems, and the I/O devices are each provided with a controller; each of the controllers is provided with a controller framework for implementing each function in accordance with a shared control scheme.
    Type: Application
    Filed: December 19, 2006
    Publication date: November 26, 2009
    Inventor: Tatsushi Iimori