Abstract: In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconductor manufacturing equipment, etc.

Abstract: In order to provide a new PSA method which can concentrate simultaneously a strong adsorbate such as xenon and a weak adsorbate such as nitrogen in a high concentration with a high recovery percentage when highly valuable gas such as xenon and krypton contained in the exhaust gas from a semiconductor manufacturing equipment, etc.

Abstract: A gas separation method is provided in which, when separating a first component and a second component from a mixed gas containing a plurality of components by using a pressure swing adsorption method, these components can be efficiently recovered and cost reduction can be achieved. Between an adsorption step and a regeneration process step, which use a first adsorption column containing a first adsorbent on which the first component is less readily adsorbable and the second component is absorbable, and a second adsorption column containing a second adsorbent on which the first component is readily adsorbable and the second component is less readily adsorbable, an equalization depressurization step and an equalization pressurization process step, in which the pressure of the first and second adsorption columns is equalized, is carried out.

Abstract: A gas separation method is provided in which, when separating a first component and a second component from a mixed gas containing a plurality of components by using a pressure swing adsorption method, these components can be efficiently recovered and cost reduction can be achieved. Between an adsorption step and a regeneration process step, which use a first adsorption column containing a first adsorbent on which the first component is less readily adsorbable and the second component is absorbable, and a second adsorption column containing a second adsorbent on which the first component is readily adsorbable and the second component is less readily adsorbable, an equalization depressurization step and an equalization pressurization process step, in which the pressure of the first and second adsorption columns is equalized, is carried out.

Abstract: A gas separation method and apparatus that recovers efficiently principal gas components from a feed gas that includes a plurality of components, and enables supplying the product gases continuously at a stable flow rate and component concentration. A first separation step using a first adsorption column and a second separation step using a second adsorption column are provided, a circulating feed gas, consisting of the recovered exhaust gases discharged in each of the steps and the feed gas, is used as a gas to be separated. The outflow rate and component concentration of a second gas product are maintained constant by controlling the outflow rate of the first gas product.

Abstract: The invention provides a gas separation method and apparatus that can recover efficiently principal gas components from a feed gas that includes a plurality of components, and enables supplying the product gases continuously at a stable flow rate and component concentration. In the present invention, a first separation step using a first adsorption column and a second separation step using a second adsorption column are provided, a circulating feed gas, which is consisting of the recovered exhaust gases discharged in each of the steps and the feed gas, is used as a gas to be separated, the outflow rate and component concentration of a second gas product are maintained at a constant by controlling the outflow rate of the first gas product.