Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.

Abstract: A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.

Abstract: The imprint apparatus according to the present invention for forming a pattern by curing a resin in a state in which a pattern region in a mold is brought into contact with the resin on a shot region in a substrate, includes an element configured to adjust an irradiation region of light from a light source with which the substrate is irradiated, a measurement unit configured to measure a position of a mark formed in the mold, and a controller configured to control a position of the irradiation region with respect to the position of the mark in a plane parallel to a surface of the substrate, based on a measurement result of the position of the mark by the measurement unit.

Abstract: The present invention provides an imprint method of forming a pattern on an imprint material on a substrate using a mold, comprising: performing preliminary curing of irradiating the imprint material with light to cure the imprint material to a first target hardness; and performing main curing of irradiating the imprint material with curing light to cure the imprint material to a second target hardness, wherein the preliminary curing includes a first process of irradiating the imprint material with first light to which the imprint material has first reaction sensitivity, and a second process of irradiating the imprint material with second light to which the imprint material has second reaction sensitivity lower than the first reaction sensitivity, and is controlled such that an end timing of the second process is later than an end timing of the first process.

Abstract: A method and system for imprinting a substrate supported on a moveable stage is provided and includes contacting a liquid resist on the substrate with a template and aligning the substrate with the template using a feedback-feedforward control process with a first set of control parameters. Calibration data is obtained and the viscosity of at least a portion of the resist is increased. The substrate is then with the template using the feedback-feedforward control process with a second set of control parameters after the viscosity of the resist has increased, the second set of control parameters are determined based on the calibration data and the resist is cured under the template.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: The present invention provides an imprint method of forming a pattern on an imprint material on a substrate using a mold, comprising: performing preliminary curing of irradiating the imprint material with light to cure the imprint material to a first target hardness; and performing main curing of irradiating the imprint material with curing light to cure the imprint material to a second target hardness, wherein the preliminary curing includes a first process of irradiating the imprint material with first light to which the imprint material has first reaction sensitivity, and a second process of irradiating the imprint material with second light to which the imprint material has second reaction sensitivity lower than the first reaction sensitivity, and is controlled such that an end timing of the second process is later than an end timing of the first process.

Abstract: An imprint apparatus executes imprint processing of curing imprint material in a state in which the imprint material supplied onto a substrate and a mold are in contact with each other. The imprint apparatus includes a modulator configured to modulate incident light, a first optical system configured to guide first light from a first light source to the modulator, and second light from a second light source that has a wavelength different from that of the first light to the modulator, and a second optical system configured to guide modulated light modulated by the modulator to the substrate.

Abstract: A turbocharger includes a compressor housing having an accommodation depression, a return passage, a ring member, and a covering member mounted to the compressor housing. The return passage has an inlet, an outlet, and a communication passage through which the inlet is connected to the outlet. A bottom surface of the accommodation depression has an inlet forming surface that cooperates with the ring member to form the inlet. The communication passage is formed between an inner peripheral surface of the accommodation depression and an outer peripheral surface of the ring member. The covering member has a falling prevention portion and an outlet forming surface. The outlet forming surface cooperates with the ring member to form the outlet. The falling prevention portion is located between the ring member and the outlet forming surface, and contacts the ring member to prevent the ring member from falling off the accommodation depression.

Abstract: A turbocharger includes a bearing housing, a compressor housing connected to the bearing housing via a seal plate, a compressor impeller, a diffuser passage, a diffuser surface, and a cooling passage. The bearing housing has a first facing surface, and a first extending surface that is formed continuously with the first facing surface. The seal plate has a second facing surface that faces the first facing surface, and a second extending surface that is formed continuously with the second facing surface. The second extending surface faces the first extending surface in a radial direction of the impeller shaft. The cooling passage is defined by the first facing surface, the first extending surface, the second facing surface, and the second extending surface.

Abstract: A turbocharger includes a compressor housing, a compressor impeller, a diffuser passage, a diffuser surface, a cooling passage, and a return passage. The diffuser surface is a part of the compressor housing and is a wall surface of the compressor housing that faces the diffuser passage. A part of an intake gas returns through the return passage to an upstream side of the compressor impeller in a flow direction of the intake gas in the compressor housing. A passage forming member is attached to the compressor housing, and cooperates with the compressor housing to form the return passage. The compressor housing has an insertion recess that has a circular shape. The insertion recess receives an insertion portion that is a part of the passage forming member and has a cylindrical shape. The cooling passage is formed by the insertion recess and the insertion portion inserted into the insertion recess.

Abstract: An image forming apparatus includes: a plurality of paper supplying trays; an image forming unit; and a cover. The image forming apparatus further includes a cover opening/closing detecting unit that detects an operation for opening/closing the cover; a paper supplying tray opening/closing detecting unit that detects an operation for opening/closing the paper supplying tray; a paper jam detecting unit that detects a paper jam in at least one place in a paper transporting path; a paper jam release deciding unit that decides whether the paper jam in the detecting place is released or not after the confirmation of a detection; and a completion control unit that controls to complete a paper jam processing based on the decision that the paper jam in all of the places in the paper transporting path is released through the paper jam release deciding unit.

Abstract: An image forming apparatus includes: a plurality of paper supplying trays; an image forming unit; and a cover. The image forming apparatus further includes a cover opening/closing detecting unit that detects an operation for opening/closing the cover; a paper supplying tray opening/closing detecting unit that detects an operation for opening/closing the paper supplying tray; a paper jam detecting unit that detects a paper jam in at least one place in a paper transporting path; a paper jam release deciding unit that decides whether the paper jam in the detecting place is released or not after the confirmation of a detection; and a completion control unit that controls to complete a paper jam processing based on the decision that the paper jam in all of the places in the paper transporting path is released through the paper jam release deciding unit.

Abstract: The degree of freedom in design is increased while maintaining strength by enabling a decorative member to be disposed without thinning a wheel main body. A wheel is made up of a wheel main body 1 which is made up of a rim portion 10 and a disc portion 11 and which has a vent hole 141 in the disc portion 11 and a decorative member 2 made from a resin which is held in at least the disc portion 11 and is observed from the vent hole 141. Since the decorative member 2 is observed in the vent hole 141, the wheel main body 1 including spoke portions 14 does not have to be thinned. In addition, since the design of the decorative member is observed in cooperation with the design of the disc portion 11, the degree of freedom in design is increased.

Abstract: An electronic device is provided with an enclosure having a side wall in which vent holes are formed, a heat generator stored in the enclosure, a radiator disposed adjacent to the vent holes, a heat receiver thermally connected to the heat generator, a heat transmission member having one end thermally connected to the heat receiver and the other end thermally connected to the radiator, a fan disposed adjacent to the radiator to generate cooling air toward the radiator, and a seal member that seals a gap formed between the radiator and the side wall having the vent holes formed therein.

Abstract: An electronic device is provided with an enclosure having a side wall in which vent holes are formed, a heat generator stored in the enclosure, a radiator disposed adjacent to the vent holes, a heat receiver thermally connected to the heat generator, a heat transmission member having one end thermally connected to the heat receiver and the other end thermally connected to the radiator, a fan disposed adjacent to the radiator to generate cooling air toward the radiator, and a seal member that seals a gap formed between the radiator and the side wall having the vent holes formed therein.