Abstract: A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.

Abstract: An electric connection member comprises a conductive member, a fixing member which brings the conductive member into contact with a connection target member and holds the conductive member in a state of compression in a thickness direction Z. The conductive member has a compressive stress of 1.0 N/mm2 or more and 15.0 N/mm2 or less when compressed by 25% in the thickness direction. The fixing member has an elongation of 400 ?m or less when drawn at 96 kPa for 30 minutes in a direction along the thickness direction Z.

Abstract: The present invention aims to provide an adhesive sheet excellent in both shear strength and slurry resistance at high temperature and excellent in removability that enables removal without adhesive residue. The present invention also aims to provide a polishing pad with an adhesive sheet including the adhesive sheet.

Abstract: An electric connection member comprises a conductive member, a fixing member which brings the conductive member into contact with a connection target member and holds the conductive member in a state of compression in a thickness direction Z. The conductive member has a compressive stress of 1.0 N/mm2 or more and 15.0 N/mm2 or less when compressed by 25% in the thickness direction. The fixing member has an elongation of 400 ?m or less when drawn at 96 kPa for 30 minutes in a direction along the thickness direction Z.