Abstract: A CT apparatus includes a plurality of imaging units, a rotation mechanism, and a CPU. The imaging unit includes a radiation source and a radiation detector. The rotation mechanism rotates the plurality of imaging units around a body axis of the subject while maintaining a disposition interval. An imaging control unit of the CPU controls operations of the plurality of imaging units and the rotation mechanism. An angular interval that is determined by a frame rate of the radiation detector and a rotation speed of the imaging unit and that defines an acquisition time of a projection image based on the radiation is the same for the plurality of imaging units. The plurality of imaging units have different phases in a rotation direction, and positions where the plurality of imaging units acquire the projection images are separated by a set angle that is less than the angular interval.

Abstract: A radiation source includes a radiation tube having a cathode which is a cold cathode. An imaging control unit directs the radiation source to intermittently and alternately emit the first radiation having a first energy distribution and the second radiation having a second energy distribution different from the first energy distribution whenever a rotation mechanism rotates the radiation source and a radiation detector by a preset angle. The imaging control unit directs the radiation detector to output a first projection image based on the first radiation and a second projection image based on the second radiation which are obtained by the intermittent emission of the first radiation and the second radiation. An image processing unit generates a tomographic image on the basis of the first projection image and the second projection image.

Abstract: An imaging control unit performs conventional scanning, which directs a rotation mechanism to rotate a radiation source and a radiation detector without changing a positional relationship between a subject, and the radiation source and the radiation detector in a rotation axis direction, directs the radiation source to emit radiation whenever the radiation source and the radiation detector are rotated by a preset angle, and directs the radiation detector to output a projection image, at a plurality of height positions along the rotation axis direction. The image processing unit generates a tomographic image on the basis of the projection images obtained at the plurality of height positions.

Abstract: A CT apparatus includes a plurality of imaging units, a rotation mechanism, a radiation source elevating mechanism, a detector elevating mechanism, and a CPU. The imaging unit includes a radiation source that emits radiation having a quadrangular pyramid shape to a subject and a radiation detector in which a plurality of pixels detecting the radiation transmitted through the subject are two-dimensionally arranged. The rotation mechanism rotates the plurality of imaging units around a body axis of the subject. The radiation source elevating mechanism and the detector elevating mechanism change an interval between the plurality of imaging units in a rotation axis direction. An imaging control unit of the CPU controls operations of the plurality of imaging units, the rotation mechanism, the radiation source elevating mechanism, and the detector elevating mechanism.

Abstract: An organic electroluminescence display device includes a substrate including a first surface, a first area arranged on the first surface and including one or more first spacers and a plurality of pixels each including a light-emitting layer, a third area arranged on the first surface, surrounding the first area, and not including spacers, and a second area arranged on the first surface, surrounding the third area, and including one or more second spacers. The plurality of pixels each including the light-emitting layer is arranged along a first direction and a second direction intersecting the first direction, and a length of the third area in the second direction is a total length of pitches for at least two pixels.

Abstract: There is provided a technique that includes: a process chamber in which a substrate is processed; a plurality of first electrodes; a plurality of second electrodes; a high-frequency power supply configured to supply a high-frequency power; a high-frequency power application plate configured to connect the plurality of first electrodes to the high-frequency power supply; and a grounding plate configured to ground the plurality of second electrodes.

Abstract: There is provided a technique capable of reducing a corrosion of a furnace opening shutter. According to one aspect thereof, a substrate processing apparatus includes: a process vessel provided with an opening and a first sealing surface around the opening; and a furnace opening shutter provided with a second sealing surface facing the first sealing surface, and capable of closing the opening. The furnace opening shutter includes: a protective cover provided corresponding to an inner surface of the furnace opening shutter, facing the process vessel and greater than the opening; and a lid provided corresponding to an outer surface of the furnace opening shutter and supporting the protective cover. The second sealing surface is configured by an outer peripheral portion of the protective cover and the lid, and a purge gas is supplied to a gap between the first sealing surface and the second sealing surface.

Abstract: There is provided a technique that includes: imaging a gas supply hole configured to supply a plasma-converted gas into a process chamber by using an imaging device disposed in the process chamber; detecting a plasma emission intensity based on an image of the imaged gas supply hole; and determining at least one of whether abnormal plasma discharge has occurred and whether plasma flickering has occurred based on the detected plasma emission intensity.

Abstract: According to one aspect of the technique described herein, there is provided a technique including: a reaction tube defining a processing chamber wherein a substrate is processed; an electrode provided at an outer circumferential surface of the reaction tube and configured to generate plasma in the process chamber; an electrode fixing part configured to fix the electrode thereto; a heater provided at an outer circumferential surface of the electrode fixing part and configured to heat an inside of the reaction tube; and a spacer configured to provide a predetermined gap between the electrode and a surface of the electrode fixing part.

Abstract: There is provided a technique that includes: imaging a gas supply hole configured to supply a plasma-converted gas into a process chamber by using an imaging device disposed in the process chamber; detecting a plasma emission intensity based on an image of the imaged gas supply hole; and determining at least one of whether abnormal plasma discharge has occurred and whether plasma flickering has occurred based on the detected plasma emission intensity.

Abstract: According to one aspect of the technique described herein, there is provided a technique including: a reaction tube defining a processing chamber wherein a substrate is processed; an electrode provided at an outer circumferential surface of the reaction tube and configured to generate plasma in the process chamber; an electrode fixing part configured to fix the electrode thereto; a heater provided at an outer circumferential surface of the electrode fixing part and configured to heat an inside of the reaction tube; and a spacer configured to provide a predetermined gap between the electrode and a surface of the electrode fixing part.

Abstract: A disk assembly is comprised of a circular plate having an outer flange portion extending in the radial direction and a plurality of tongues each of which is pressed out in the axial direction and an annular member whose inner radius is equals to that of each tongue, wherein each distal end of each tongue is snugly fitted in the annular member and the outer flange portion is fixed to one side of the annular member.