Abstract: A process chamber window assembly is described. The process chamber window has an opening in a chamber body, a quartz window plane located on the opening and sealed with a O-ring and a buffer pad with an opening having the same shape as the quartz window pane located thereon. The window also has a view port located in the buffer pad and a fixed frame located on the view port. Screws through a plurality of screw holes in the fixed frame, the view port, the buffer pad and the chamber body fasten the window assembly to the chamber body.