Patents by Inventor TE-MING KUNG

TE-MING KUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12158332
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Grant
    Filed: July 28, 2023
    Date of Patent: December 3, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih Hung Chen, Kei-Wei Chen, Te-Ming Kung
  • Publication number: 20240345164
    Abstract: A testing system and a testing method are provided. The testing system includes a first testing device and a second testing device. The first testing device is coupled to a first stream facing-port of a device under test (DUT). The first testing device includes a controller. The second testing device is coupled to a second stream facing-port of the DUT. The controller transmits a testing signal to the DUT through the first stream facing-port to test a universal serial bus (USB) of the DUT. The DUT is operated based on the testing signal to generate a data signal. The DUT outputs the data signal to the second testing device through the second stream facing-port. The second testing device obtains status information of the DUT which is operated based on the testing signal 10 to generate a testing result. The controller determines whether the DUT is normal according to the testing result.
    Type: Application
    Filed: May 5, 2023
    Publication date: October 17, 2024
    Applicant: ASMedia Technology Inc.
    Inventor: Te-Ming Kung
  • Publication number: 20240313051
    Abstract: A semiconductor structure includes a substrate, a nanowire disposed over the substrate, a metal gate electrode layer and a gate dielectric layer. A dielectric layer is formed on the substrate. The nanowire has a first portion and a second portion. The nanowire has a first portion and a second portion, the first portion of the nanowire comprises a first semiconductor layer and a second semiconductor layer surrounded by the first semiconductor layer, the second portion comprises the second semiconductor layer. The metal gate electrode layer surrounds the first portion of the nanowire. The gate dielectric layer is disposed between the metal gate electrode layer and the nanowire.
    Type: Application
    Filed: May 27, 2024
    Publication date: September 19, 2024
    Inventors: TE-MING KUNG, YING-LANG WANG, KEI-WEI CHEN, WEN-HSI LEE, SHU WEI CHANG
  • Publication number: 20240248151
    Abstract: A testing circuit for testing a universal serial bus (USB) of an electronic device includes a controller, a first switch, a pull-down resistor, a gating pull-up resistor, and a second switch. The controller provides a control signal according to a power receiving condition of the electronic device. A control terminal of the first switch is coupled to the controller. The pull-down resistor is coupled between a configuration channel pin of the USB and a first terminal of the first switch. The gating pull-up resistor is coupled between the configuration channel pin and the control terminal of the first switch. A control terminal of the second switch is coupled to the controller. A first terminal of the second switch is coupled to a second terminal of the first switch and a ground pin of the USB. A second terminal of the second switch is coupled to a reference low voltage.
    Type: Application
    Filed: March 5, 2023
    Publication date: July 25, 2024
    Applicant: ASMedia Technology Inc.
    Inventors: Te-Ming Kung, Yi-Chung Tsai, Shih-Min Lin
  • Patent number: 12021117
    Abstract: A method of forming a semiconductor structure includes following operations. A substrate including a silicon (Si) layer is received. An amorphous germanium (Ge) layer is formed on the Si layer. A barrier layer is formed over the amorphous Ge layer. The substrate is annealed to transform the Si layer and the Ge layer to form a single crystalline SiGe layer. A Ge concentration is in a positive correlation with a ratio of a thickness of the Ge layer and a thickness of the Si layer.
    Type: Grant
    Filed: January 13, 2022
    Date of Patent: June 25, 2024
    Inventors: Te-Ming Kung, Ying-Lang Wang, Kei-Wei Chen, Wen-Hsi Lee, Shu Wei Chang
  • Publication number: 20230375330
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 23, 2023
    Inventors: Chih Hung CHEN, Kei-Wei CHEN, Te-Ming KUNG
  • Patent number: 11761751
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: September 19, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih Hung Chen, Kei-Wei Chen, Te-Ming Kung
  • Publication number: 20230230846
    Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.
    Type: Application
    Filed: March 15, 2023
    Publication date: July 20, 2023
    Inventors: Yi-Sheng LIN, Chi-Jen LIU, Chi-Hsiang SHEN, Te-Ming KUNG, Chun-Wei HSU, Chia-Wei HO, Yang-Chun CHENG, William Weilun HONG, Liang-Guang CHEN, Kei-Wei CHEN
  • Publication number: 20230154985
    Abstract: A method of forming a semiconductor structure includes following operations. A substrate including a silicon (Si) layer is received. An amorphous germanium (Ge) layer is formed on the Si layer. A barrier layer is formed over the amorphous Ge layer. The substrate is annealed to transform the Si layer and the Ge layer to form a single crystalline SiGe layer. A Ge concentration is in a positive correlation with a ratio of a thickness of the Ge layer and a thickness of the Si layer.
    Type: Application
    Filed: January 13, 2022
    Publication date: May 18, 2023
    Inventors: TE-MING KUNG, YING-LANG WANG, KEI-WEI CHEN, WEN-HSI LEE, SHU WEI CHANG
  • Patent number: 11637021
    Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: April 25, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Sheng Lin, Chi-Jen Liu, Chi-Hsiang Shen, Te-Ming Kung, Chun-Wei Hsu, Chia-Wei Ho, Yang-Chun Cheng, William Weilun Hong, Liang-Guang Chen, Kei-Wei Chen
  • Publication number: 20220316861
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Application
    Filed: June 22, 2022
    Publication date: October 6, 2022
    Inventors: Chih Hung CHEN, Kei-Wei CHEN, Te-Ming KUNG
  • Patent number: 11397078
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Grant
    Filed: March 8, 2021
    Date of Patent: July 26, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih Hung Chen, Kei-Wei Chen, Te-Ming Kung
  • Publication number: 20210364275
    Abstract: A method of evaluating a thickness of a film on a substrate includes detecting atomic force responses of the film to exposure of electromagnetic radiation in the infrared portion of the electromagnetic spectrum. The use of atomic force microscopy to evaluate thicknesses of thin films avoids underlayer noise commonly encountered when optical metrology techniques are utilized to evaluate film thicknesses. Such underlayer noise adversely impacts the accuracy of the thickness evaluation.
    Type: Application
    Filed: March 8, 2021
    Publication date: November 25, 2021
    Inventors: Chih Hung CHEN, Kei-Wei CHEN, Te-Ming KUNG
  • Publication number: 20210272818
    Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Inventors: Yi-Sheng LIN, Chi-Jen LIU, Chi-Hsiang SHEN, Te-Ming KUNG, Chun-Wei HSU, Chia-Wei HO, Yang-Chun CHENG, William Weilun HONG, Liang-Guang CHEN, Kei-Wei CHEN
  • Patent number: 11037799
    Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: June 15, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Yi-Sheng Lin, Chi-Jen Liu, Kei-Wei Chen, Liang-Guang Chen, Te-Ming Kung, William Weilun Hong, Chi-Hsiang Shen, Chia-Wei Ho, Chun-Wei Hsu, Yang-Chun Cheng
  • Publication number: 20200341926
    Abstract: An electronic apparatus installed with non-volatile memory express solid state disks (NVMe SSDs) is provided. The electronic apparatus includes a processor, a board management controller (BMC), a micro-controller, at least one first input and output (IO) expander, and a plurality of NVMe SSDs. The micro-controller is coupled to the processor and the BMC. The first IO expander is coupled between the micro-controller and the NVMe SSDs. The micro-controller reads a PRSNT # information and an IFDET # information of each of the NVMe SSDs through the first IO expander, and transmits the PRSNT # information and the IFDET # information of each of the NVMe SSDs to the processor and the BMC.
    Type: Application
    Filed: October 4, 2019
    Publication date: October 29, 2020
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Chang-Yu Tu, Te-Ming Kung, Wen-Shyan Lai
  • Publication number: 20200098591
    Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.
    Type: Application
    Filed: May 1, 2019
    Publication date: March 26, 2020
    Inventors: Yi-Sheng Lin, Chi-Jen Liu, Kei-Wei Chen, Liang-Guang Chen, Te-Ming Kung, William Weilun Hong, Chi-Hsiang Shen, Chia-Wei Ho, Chun-Wei Hsu, Yang-Chun Cheng
  • Publication number: 20180156552
    Abstract: A thermal simulation system adapted to establish a test environment for a thermal test is provided. The thermal simulation system includes a communication element, a controllable loading element, a plurality of connectors, and a controller. The communication element is configured to receive at least one of a heating control signal, a fan control signal, and a loading control signal from an external electronic device. The controllable loading element is configured to provide a loading. The connectors are configured to connect a heating element and a fan. The controller is configured to control a heat energy generated by the heating element according to the heating control signal, control a fan speed of the fan according to the fan control signal, and control a loading value of the loading provided by the controllable loading element according to the loading control signal.
    Type: Application
    Filed: December 5, 2017
    Publication date: June 7, 2018
    Applicant: COMPAL ELECTRONICS, INC.
    Inventors: Chang-Yu Tu, Te-Ming Kung, Wen-Shyan Lai, Tung-Hua Wu
  • Publication number: 20170168964
    Abstract: A hard drive disk indicator processing apparatus includes first and second processors. The first processor includes first, second and third communication interfaces. The first communication interface receives at least one serial general purpose input/output signal from a motherboard. The second communication interface receives a plurality piece of hard drive disk status information for responding to a plurality of hard drive disk statuses of hard drive disks. The third communication interface outputs serial information. The second processor includes fourth and fifth communication interfaces. The fourth communication interface is coupled to the third communication interface and receives the serial information. The fifth communication interface is coupled to a plurality of hard drive disk indicators. The first processor generates the serial information according to the at least one serial general purpose input/output signal.
    Type: Application
    Filed: December 9, 2016
    Publication date: June 15, 2017
    Inventors: Te-Ming Kung, Chang-Yu Tu, Wen-Shyan Lai
  • Patent number: 9502647
    Abstract: A resistive memory cell is disclosed. The resistive memory cell comprises a pair of electrodes and a resistance-switching network disposed between the pair of electrodes. The resistance-switching network comprises a group-IV element doping layer and a porous low-k layer. The group-IV doping layer comprises silicon oxide doped with a group-IV element. The porous low-k layer comprises porous silicon oxide or porous hafnium oxide. The group-IV element may comprise zirconium, titanium, or hafnium. The porous low-k layer may be prepared by inductively coupled plasma (ICP) treatment. A method of fabricating a resistive memory is disclosed. The method comprises forming a resistance-switching network on a first electrode using sputtering and forming a second electrode on the resistance-switching network using sputtering. The resistance-switching network comprises a group-IV element doping layer and a porous low-k layer.
    Type: Grant
    Filed: May 28, 2014
    Date of Patent: November 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Ting-Chang Chang, Kuan-Chang Chang, Tsung-Ming Tsai, Chih-Hung Pan, Ying-Lang Wang, Kei-Wei Chen, Shih-Chieh Chang, Te-Ming Kung