Abstract: A high power semiconductor device capable of preventing parasitical bipolar transistor from turning on comprises a first conduction type drain region, a first conduction type epitaxial region formed on the first conduction type drain region, a plurality of second conduction type body regions formed on the surface of the epitaxial region, at least a first conduction type source region formed on the surface of the body regions, a source electrode contact region formed on the surface of the body regions and overlapping the source region and having at least one end longer than one end of the source region, and a plurality of gate electrodes staggered with the source electrode contact region and formed on the body regions and the epitaxial region.

Abstract: A high power semiconductor device capable of preventing parasitical bipolar transistor from turning on comprises a first conduction type drain region, a first conduction type epitaxial region formed on the first conduction type drain region, a plurality of second conduction type body regions formed on the surface of the epitaxial region, at least a first conduction type source region formed on the surface of the body regions, a source electrode contact region formed on the surface of the body regions and overlapping the source region and having at least one end longer than one end of the source region, and a plurality of gate electrodes staggered with the source electrode contact region and formed on the body regions and the epitaxial region.

Abstract: Methods of forming semiconductor switching devices having trench-gate electrodes include the steps of implanting base region dopants of second conductivity type into a semiconductor substrate to define a preliminary base region therein. A step is then performed to form a trench having sidewalls which extend through the preliminary base region. A sacrificial insulating layer is then formed on the sidewalls of the trench while the implanted base region dopants are simultaneously diffused into the region of first conductivity type. The sacrificial insulating layer is then removed. Next, a gate electrode insulating layer is formed on the sidewalls and on a bottom of the trench. A gate electrode is then formed on the gate electrode insulating layer. Dopants of first conductivity type are then implanted into the semiconductor substrate to define a preliminary source region, which forms a P-N junction with the implanted base region dopants, and into the gate electrode to improve the conductivity thereof.