Abstract: A metrology system is provided including a laser and radar configuration and a retroreflector portion. A main body portion of the laser and radar configuration includes a laser portion and a radar portion, which transmit laser light and radar signals. A rotator portion rotates the main body portion to change a transmission direction of the laser light and the radar signals (e.g., as partially controlled based on operations of an optical sensor of the laser portion) to be directed toward the retroreflector portion. The radar portion receives the reflected radar signals (e.g., which enable a distance to the retroreflector portion to be determined). 3-dimensional positions of the retroreflector portion (e.g., as disposed at an object to be measured) are determined based at least in part on angular positions determined from operations of the laser portion and distances determined from operations of the radar portion.

Abstract: A metrology system is provided for use with a movement system that moves an end tool (e.g., a probe). The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The sensor configuration comprises a plurality of light beam sensors. The light beam source configuration directs light beams to the light beam sensors of the sensor configuration. One of the light beam source configuration or the sensor configuration is coupled to the end tool and/or an end tool mounting configuration of the movement system which moves the end tool. The light beams that are directed to the light beam sensors cause the light beam sensors to produce corresponding measurement signals. A processing portion processes the measurement signals from the light beam sensors which indicate the position and orientation of the end tool.

Abstract: An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.

Abstract: An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.

Abstract: An inductive type absolute electronic position encoder utilizing a single track configuration is provided. The encoder includes a scale portion and a detector portion configured to move relative to each other along a measuring axis direction. The scale portion includes a first scale element portion and a second scale element portion. The detector portion includes a field generating portion configured to generate changing magnetic flux, and a sensing portion including a first sensing element portion configured to operate with the first scale element portion and a second sensing element portion configured to operate with the second scale element portion. The detector portion and the scale portion are arranged in a single track configuration in which the first and second scale element portions are stacked relative to one another and the first and second sensing element portions are at least one of stacked or interleaved relative to one another.

Abstract: An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.

Abstract: An inductive type position encoder includes a scale, a detector portion and a signal processor. According to one aspect, field generating elements and sensing elements of the detector portion are provided on opposite sides of the scale such that at least part of the scale is between the field generating elements and the sensing elements (transmissive configuration). According to another aspect, the scale comprises a periodic scale pattern including signal modulating elements that are disposed along a scale direction, which is not parallel to a measuring axis direction of the encoder and is slanted at a scale angle relative to the measuring axis direction, such that there is a corresponding y-direction displacement for a given x-direction displacement of the encoder. These aspects of the disclosure make it possible to design a very compact inductive type position encoder, including one capable of indicating an absolute position along the scale.

Abstract: A radar metrology system is provided for use with a movement system (e.g., a robot arm) that moves an end tool, and includes mobile and stationary radar configurations. The mobile radar configuration includes mobile radar components that are coupled to the end tool or an end tool mounting configuration. The stationary radar configuration includes stationary radar components (e.g., which define a metrology frame volume that surrounds a movement volume in which the end tool is moved). Distances are determined between stationary radar components and mobile radar components based at least in part on radar signals, wherein the distances indicate (e.g., and may be utilized to determine) a position and orientation (e.g., of the mobile radar configuration and/or end tool). The radar signals are either transmitted from stationary radar components and received by mobile radar components, or transmitted from mobile radar components and received by stationary radar components.

Abstract: An inductive position encoder includes a scale, a detector and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with a spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the changing magnetic flux provided by adjacent SME's. Some or all of the conductive loops are configured according to an intra-loop shift relationship wherein equal “shifted proportions” of a loop are shifted in opposite directions by W1/4K. K is an odd integer. The intra-loop shift relationship can be used to suppress Kth spatial harmonic components in the detector signals, while also overcoming longstanding detrimental layout problems. It combines easily with “loop width” spatial filtering techniques that filter other spatial harmonic signal components.

Abstract: A metrology system is provided for use with a movement system that moves an end tool (e.g., a probe). The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The sensor configuration comprises a plurality of light beam sensors. The light beam source configuration directs light beams to the light beam sensors of the sensor configuration. One of the light beam source configuration or the sensor configuration is coupled to the end tool and/or an end tool mounting configuration of the movement system which moves the end tool. The light beams that are directed to the light beam sensors cause the light beam sensors to produce corresponding measurement signals. A processing portion processes the measurement signals from the light beam sensors which indicate the position and orientation of the end tool.

Abstract: An inductive position encoder includes a scale, a detector and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with a spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the changing magnetic flux provided by adjacent SME's. Some or all of the conductive loops are configured according to an intra-loop shift relationship wherein equal “shifted proportions” of a loop are shifted in opposite directions by W1/4K. K is an odd integer. The intra-loop shift relationship can be used to suppress Kth spatial harmonic components in the detector signals, while also overcoming longstanding detrimental layout problems. It combines easily with “loop width” spatial filtering techniques that filter other spatial harmonic signal components.

Abstract: An inductive position encoder includes a scale, detector, and signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the magnetic flux provided by adjacent SME's. The conductive loops have an average MA dimension that spatially filters a 3rd spatial harmonic signal component and are located along the MA according to an “inter-loop” shift relationship wherein first and second equal numbers of positive and negative polarity loops, are shifted in opposite directions by W1/4K (K=3, 5, 7, 9). Third and Kth spatial harmonic components are both reduced in the detector signals while using a novel “layout friendly” loop arrangement to solve longstanding detrimental layout problems.

Abstract: An inductive type position encoder includes a scale, a detector portion and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis with a spatial wavelength W1. The SME in the pattern comprise similar conductive plates or loops. The detector portion comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements may comprise conductive loop portions arranged along the measuring axis and configured to provide detector signals which respond to a local effect on the changing magnetic flux provided by adjacent SME's. In various implementations, SMEs having an average dimension DSME along the measuring axis direction that is at least 0.55*W1 and at most 0.8*W1 are combined with sensing elements having an average dimension along the measuring axis direction that is at least 0.285*W1 and at most 0.315*W1, which improves detector signal accuracy.

Abstract: A pitch compensated inductive position encoder includes a scale comprising first and second tracks including periodic patterns having a wavelength W, a detector, and signal processing. The second track pattern may be shifted along the measuring direction by a pattern offset STO relative to the first track pattern. In the detector, first-track and second-track field generating coil portions generate fields in first and second interior areas aligned with the first and second pattern tracks, respectively. First and second sensing coil configurations that are aligned with the first and second tracks, respectively, are offset relative to one another by STO+/?0.5*W along the measuring direction. In various embodiments, the first and second sensing coil configurations may have the same sequence of individual coil polarities if the generated field polarities are different, and may have inverted or opposite sequences if the generated field polarities are the same.

Abstract: An electronic position encoder includes a scale and detector. The detector includes a field generating coil (FGC) having elongated portions (EPs) bounding a generated field area (GFA) aligned with sensing windings, to provide position signals responsive to the scale interacting with the generated field. Sensing elements and EPs are fabricated in “front” layers of the detector. A transverse conductor portion (TCP) fabricated in a “rear” layer connects the EP of the FGC via feedthroughs. A shield region in a layer between the front and rear layers intercepts at least a majority of a projection of the TCP toward the front layers to eliminate undesirable signal effects. The FGC feedthroughs generate GFC feedthrough stray fields. Feedthrough pairs that connect sensing winding signals to rear layers of the detector are specially configured to mitigate undesirable signal effects that may otherwise result from their coupling to the GFC feedthrough stray fields.

Abstract: An electronic position encoder includes a scale and detector. The detector includes a field generating coil (FGC) having elongated portion configurations (EPCs) bounding a generated field area (GFA) aligned with sensing elements in a sensing area, to provide position signals responsive to the scale interacting with the generated field. Sensing elements and EPCs are fabricated in “front” layers of the detector portion. The EPCs include end gradient arrangements (EGAs) configured to reduce field strength in the generated field area as a function of position along the x-axis direction for positions approaching the end of the GFA. A shielded transverse conductor portion (TCP) fabricated in a “rear” layer connects the EPCs and/or EGAs of the FGC via feedthroughs. A conductive shield region (CSR) configuration in a CSR layer between the front and rear layers intercepts at least a majority of a projection of the TCP toward the front layers.

Abstract: An electronic position encoder includes a scale and detector. The detector includes a field generating coil (FGC) having elongated portion configurations (EPCs) bounding a generated field area (GFA) aligned with sensing elements in a sensing area, to provide position signals responsive to the scale interacting with the generated field. Sensing elements and EPCs are fabricated in “front” layers of the detector portion. The EPCs include end gradient arrangements (EGAs) configured to reduce field strength in the generated field area as a function of position along the x-axis direction for positions approaching the end of the GFA. A shielded transverse conductor portion (TCP) fabricated in a “rear” layer connects the EPCs and/or EGAs of the FGC via feedthroughs. A conductive shield region (CSR) configuration in a CSR layer between the front and rear layers intercepts at least a majority of a projection of the TCP toward the front layers.

Abstract: An electronic position encoder includes a scale and detector. The detector includes a field generating coil (FGC) having elongated portions (EPs) bounding a generated field area (GFA) aligned with sensing windings, to provide position signals responsive to the scale interacting with the generated field. Sensing elements and EPs are fabricated in “front” layers of the detector. A transverse conductor portion (TCP) fabricated in a “rear” layer connects the EP of the FGC via feedthroughs. A shield region in a layer between the front and rear layers intercepts at least a majority of a projection of the TCP toward the front layers to eliminate undesirable signal effects. The FGC feedthroughs generate GFC feedthrough stray fields. Feedthrough pairs that connect sensing winding signals to rear layers of the detector are specially configured to mitigate undesirable signal effects that may otherwise result from their coupling to the GFC feedthrough stray fields.

Abstract: An electronic position encoder includes a scale and a detector. The detector includes a field generating coil (FGC) having elongated portions bounding a generated field area, and a sensing area, both aligned along the scale. Sensing elements in the sensing area provide position signals responsive to the scale interacting with the generated field. Sensing elements and elongated portions are fabricated in “front” layers of the detector portion. A crosswise shielded end section (SES) fabricated in a “rear” layer connects the elongated portions via feedthroughs. The sensing element area is longer than the elongated portions of the FGC. A projection of the SES normal to the layers overlaps sensing elements in the sensing element area. A conductive shield region CSR is configured in a CSR layer interposed between the front and rear layers to intercept at least a majority of the projection of the SES toward the overlapped sensing elements.

Abstract: An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe with a motion volume extending on opposite sides of the coil board configuration. The coil board configuration includes N top rotary sensing coils (RSCs) and a top axial sensing coil configuration (ASCC), and N bottom RSCs and a bottom ASCC. A pair of stylus-coupled conductive disruptors move along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) of the coil board configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the disruptors), and coil signals indicate the disruptors and/or stylus positions. Areas of the conductive disruptors may be larger than an area of the generating coil in some implementations, and the conductive disruptors may each comprise a plurality of concentric conductive loops, spirals, etc.