Patents by Inventor Ted Tevis

Ted Tevis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transfer Position for Workpieces and Replaceable Parts in a Vacuum Processing Apparatus
    Publication number: 20230091035
    Abstract: Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The processing system can include a loadlock chamber, a transfer chamber, and at least two processing chamber having two or more processing stations. The processing system further includes a storage chamber for storing replaceable parts. The transfer chamber includes a workpiece handling robot. The workpiece handling robot can be configured to transfer a plurality of replaceable parts from the processing stations to the storage chamber.
    Type: Application
    Filed: November 28, 2022
    Publication date: March 23, 2023
    Inventors: Martin L. Zucker, Peter J. Lembesis, Ted Tevis, Ryan M. Pakulski, Michael X. Yang
  • Systems And Methods For Transportation Of Replaceable Parts In a Vacuum Processing Apparatus
    Publication number: 20200365381
    Abstract: Systems and methods for processing workpieces, such as semiconductor workpieces are provided. One example embodiment is directed to a processing system for processing a plurality of workpieces. The processing system can include a loadlock chamber, a transfer chamber, and at least two processing chamber having two or more processing stations. The processing system further includes a storage chamber for storing replaceable parts. The transfer chamber includes a workpiece handling robot. The workpiece handling robot can be configured to transfer a plurality of replaceable parts from the processing stations to the storage chamber.
    Type: Application
    Filed: May 13, 2020
    Publication date: November 19, 2020
    Inventors: Martin L. Zucker, Peter J. Lembesis, Ted Tevis, Ryan M. Pakulski, Michael X. Yang