Abstract: Provided are a substrate with a multilayer reflective film, a reflective mask blank, a reflective mask, and a method for manufacturing a semiconductor device capable of, for example, preventing reduction of a reflectance of a multilayer reflective film due to formation of a silicide in a protective film. A substrate with a multilayer reflective film 100 comprises a substrate 10, a multilayer reflective film 12 disposed on the substrate 10, and a protective film 18 disposed on the multilayer reflective film 12. The protective film 18 comprises a SiN material layer comprising silicon (Si) and nitrogen (N) or a SiC material layer comprising silicon (Si) and carbon (C) on a side in contact with the multilayer reflective film 12. The SiN material layer or the SiC material layer comprises an oxide of at least one metal selected from magnesium (Mg), aluminum (Al), titanium (Ti), yttrium (Y), and zirconium (Zr).

Abstract: Provided is a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of a material containing a transition metal and silicon and further containing at least one of oxygen and nitrogen. The thin film has as its surface layer an oxide layer with an oxygen content higher than that of the thin film of a region other than the surface layer. The thin film is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side. The oxide layer is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side.

Abstract: Provided is a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of a material containing a transition metal and silicon and further containing at least one of oxygen and nitrogen. The thin film has as its surface layer an oxide layer with an oxygen content higher than that of the thin film of a region other than the surface layer. The thin film is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side. The oxide layer is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side.

Abstract: Provided is a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of a material containing a transition metal and silicon and further containing at least one of oxygen and nitrogen. The thin film has as its surface layer an oxide layer with an oxygen content higher than that of the thin film of a region other than the surface layer. The thin film is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side. The oxide layer is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side.

Abstract: [Problem] A perpendicular magnetic disk with an improved SNR and an increased recording density by further improving crystal orientation of a preliminary ground layer formed of an Ni-base alloy is provided. [Solution] A typical structure of the perpendicular magnetic disk according to the present invention includes, on a base 110, a soft magnetic layer 130, a Ta alloy layer 140 provided on the soft magnetic layer 130, an Ni alloy layer 142 provided on the Ta alloy layer 140, a ground layer 150 provided on the Ni alloy layer 142 and having Ru as a main component, and a granular magnetic layer 160 provided on the ground layer 150. The Ta alloy layer 140 is a layer containing 10 atomic percent or more and 45 atomic percent or less Ta and having amorphous and soft magnetic properties.

Abstract: A perpendicular magnetic disk is provided. The disk includes, on a base and in the order from bottom, a first granular magnetic layer group including a plurality of magnetic layers each having a granular structure, a non-magnetic layer having Ru or a Ru alloy as a main component, a second granular magnetic layer group including a plurality of magnetic layers each having the granular structure, and an auxiliary recording layer having a CoCrPtRu alloy as a main component. Layers closer to a front surface among the plurality of magnetic layers included in the first granular magnetic layer group having an equal or smaller content of Pt. Layers closer to the front surface among the plurality of magnetic layers included in the second granular magnetic layer group having an equal or smaller content of Pt and having an equal or larger content of an oxide.

Abstract: A perpendicular magnetic recording medium includes a substrate, a soft magnetic layer, a pre-underlayer, an underlayer, and a main recording layer serving as a magnetic recording layer. The pre-underlayer contains seed crystal grains that serve as a base for crystal grains of the underlayer, and an addition substance that is added between the seed crystal grains and composed of an element having an atomic radius smaller than that of an element forming the seed crystal grains.

Abstract: Embodiments of a perpendicular magnetic recording medium include: a base; at least a first magnetic recording layer having a granular structure in which a non-magnetic grain boundary portion is formed between crystal particles grown in a columnar shape; a non-magnetic split layer containing Ru disposed on the first magnetic layer; and a second magnetic recording layer that is disposed on the split layer and that has a granular structure in which a non-magnetic grain boundary portion is formed between crystal particles grown in a columnar shape, wherein the first magnetic layer and the second magnetic layer contain oxides that form the grain boundary, and when an oxide content of the first magnetic layer is represented by A and an oxide content of the second magnetic layer is represented by B, a relationship between the oxide contents A/B is in the range of 0.5<A/B<1.0.

Abstract: An object of the present invention is to provide a perpendicular magnetic recording medium the SNR of which is further improved while a high coercive force Hc is secured so that a higher recoding density can be achieved.

Abstract: Provided is a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of a material containing a transition metal and silicon and further containing at least one of oxygen and nitrogen. The thin film has as its surface layer an oxide layer with an oxygen content higher than that of the thin film of a region other than the surface layer. The thin film is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side. The oxide layer is formed so that the thickness of its outer peripheral portion is greater than that of its central portion on the main surface side.

Abstract: A method for manufacturing a magnetic recording medium includes the steps of (a) forming a perpendicular magnetic recording layer and (b) applying an ion beam to regions between tracks of the perpendicular magnetic recording layer so as to form separation regions for magnetically separating the tracks from each other. In the step (a), a continuous film layer composed of a multilayer film is formed, and CoB layers and Pd layers are laminated in the multilayer film. In the step (b), the CoB layers and the Pd layers are melted by the ion beam so as to form an alloy of metals contained in the CoB layers and the Pd layers to thereby form the separation regions.

Abstract: A perpendicular magnetic recording medium with SNR improved by reducing noise due to an auxiliary recording layer so that a higher recording density can be achieved. The perpendicular magnetic recording medium 100 includes a base, at least a magnetic recording layer 122 having a granular structure in which a non-magnetic grain boundary portion is formed between crystal particles grown in a columnar shape; a non-magnetic split layer 124 disposed on the magnetic recording layer 122 and containing Ru and oxygen; and an auxiliary recording layer 126 that is disposed on the split layer 124 and that is magnetically approximately continuous in an in-plane direction of a main surface of the base 110.

Abstract: A perpendicular magnetic recording medium of the invention is characterized by having, on a disk substrate 110, a soft magnetic layer 14, a magnetic recording layer 22, a continuous layer 24 magnetically continuous in the in-plane direction of the substrate, a blocking layer 25 for blocking shock imposed on the continuous layer, and a medium protective layer 28 containing carbon formed on the blocking layer.

Abstract: An object of the present invention is to increase an electromagnetic transducing characteristic (in particular, SNR) by further promoting separation and isolation of magnetic grains of a magnetic recording layer (122) in a perpendicular magnetic recording medium (100).

Abstract: An object of the present invention is to provide a method of manufacturing a perpendicular magnetic recording medium (100) in which both of a coercive force Hc and reliability can be achieved at a higher level even with heating at the time of forming a medium protective layer (126) and to provide the perpendicular magnetic recording medium (100).

Abstract: A magnetic disk 10 for use in perpendicular magnetic recording has at least a magnetic recording layer on a substrate 1. The magnetic recording layer is composed of a ferromagnetic layer 5 of a granular structure containing silicon (Si) or an oxide of silicon (Si) between crystal grains containing cobalt (Co), a stacked layer 7 having a first layer containing cobalt (Co) or a Co alloy and a second layer containing palladium (Pd) or platinum (Pt), and a spacer layer 6 interposed between the ferromagnetic layer 5 and the stacked layer 7. After forming the ferromagnetic layer 5 on the substrate 1 by sputtering in an argon gas atmosphere, the stacked layer 7 is formed by sputtering in the argon gas atmosphere at a gas pressure lower than that used when forming the ferromagnetic layer 5.

Abstract: A perpendicular magnetic disk that includes, a base 110, a granular magnetic layer 160, and a auxiliary recording layer 180 disposed as an upper layer of the granular magnetic layer 160. The granular magnetic layer 160 has a granular structure in which a grain boundary portion is formed by segregation of a non-magnetic substance containing an oxide as a main component around magnetic particles containing a CoCrPt alloy grown in a columnar shape as a main component. The auxiliary recording layer 180 contains a CoCrPtRu alloy as a main component and has a film thickness of 1.5 nm to 4.0 nm. With this structure, the auxiliary recording layer can be thinned while maintaining the function thereof to improve SNR.

Abstract: A method for manufacturing a magnetic recording medium for perpendicular magnetic recording includes the steps of forming a first magnetic layer which has magnetic crystal grains exhibiting perpendicular magnetic anisotropy and nonmagnetic substances for magnetically separating the magnetic crystal grains from each other at grain boundaries of the magnetic crystal grains, forming a second magnetic layer which has magnetic grains exchange-coupled to the magnetic crystal grains, a grain boundary width of the magnetic grains being smaller than a grain boundary width of the magnetic crystal grains, and forming separation regions which magnetically separate tracks from each other in regions between the tracks of the magnetic recording medium in at least the second magnetic layer. The separation regions are disposed substantially only in the second magnetic layer of the first magnetic layer and the second magnetic layer.

Abstract: A vertical magnetic recording disc (100) includes a base (10), a magnetic recording layer (22), and a medium protection layer (26). The magnetic recording layer (22) is a ferromagnetic layer having a granular structure where a granular portion is formed. The medium protection layer (26) contains nitrogen (N) atoms and carbon (C) atoms with a number ratio (N/C) in a range from 0.050 to 0.150. In a Raman spectrum obtained by exciting the medium protection layer (26) by argon ion laser light of wavelength 514.5 nm, from which a fluorescence is removed, the peak ratio Dh/Gh is in a range from 0.70 to 0.95, when a D peak Dh appearing in the vicinity of 1350 cm?1 is separated from G peak Gh appearing in the vicinity of 1520 cm?1 by the Gauss function.

Abstract: A perpendicular magnetic disk is provided. The disk includes, on a base and in the order from bottom, a first granular magnetic layer group including a plurality of magnetic layers each having a granular structure, a non-magnetic layer having Ru or a Ru alloy as a main component, a second granular magnetic layer group including a plurality of magnetic layers each having the granular structure, and an auxiliary recording layer having a CoCrPtRu alloy as a main component. Layers closer to a front surface among the plurality of magnetic layers included in the first granular magnetic layer group having an equal or smaller content of Pt. Layers closer to the front surface among the plurality of magnetic layers included in the second granular magnetic layer group having an equal or smaller content of Pt and having an equal or larger content of an oxide.