Patents by Inventor Teng-Da Hung

Teng-Da Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultraviolet curing apparatus having top liner and bottom liner made of low-coefficient of thermal expansion material
    Patent number: 9496157
    Abstract: An ultraviolet curing apparatus includes a chamber, a gas flow generator, and an ultraviolet lamp. The gas flow generator includes a top liner and a bottom liner coupled to each other. The top liner and the bottom liner are disposed in the chamber, and are made of low-coefficient of thermal expansion material. The ultraviolet lamp is disposed on the chamber and is configured for providing ultraviolet light.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: November 15, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Teng-Da Hung, Liang-Chang Hsieh, Chun-Lung Lin, Hsin-Hung Chi, Yun-Wen Chu, Jiun-Wei Su
  • Ultraviolet Curing Apparatus And Ultraviolet Curing Method Thereof
    Publication number: 20150132973
    Abstract: An ultraviolet curing apparatus includes a chamber, a gas flow generator, and an ultraviolet lamp. The gas flow generator includes a top liner and a bottom liner coupled to each other. The top liner and the bottom liner are disposed in the chamber, and are made of low-coefficient of thermal expansion material. The ultraviolet lamp is disposed on the chamber and is configured for providing ultraviolet light.
    Type: Application
    Filed: November 14, 2013
    Publication date: May 14, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Teng-Da Hung, Liang-Chang Hsieh, Chun-Lung Lin, Hsin-Hung Chi, Yun-Wen Chu, Jiun-Wei Su