Abstract: A method is described. The method includes obtaining a relationship between a thickness of a contamination layer formed on a mask and an amount of compensation energy to remove the contamination layer, obtaining a first thickness of a first contamination layer formed on the mask from a thickness measuring device, and applying first compensation energy calculated from the relationship to a light directed to the mask.

Abstract: There is provided a liquid water harvester based on a valve-controlled active air supply and belongs to the field of liquid water harvesters. The present disclosure aims to address the problem of low airflow speed, high environmental humidity requirements, and auxiliary heating of an adsorption stage in the current atmospheric water harvesting technologies. In the present disclosure, the active air supply device is used to speed up the air circulation in the harvester so as to greatly shorten the adsorption time of the moisture absorbing material for the water vapor in the air and improve the heat dissipation of the micro-nano structure condensation surface. The electric valve controls the air circulation circuit and cooperates with the active air supply device. In this case, only one active air supply device can be used to complete the air supply and the condensation heat dissipation at the same time.

Abstract: There is provided a liquid water harvester based on a valve-controlled active air supply and belongs to the field of liquid water harvesters. The present disclosure aims to address the problem of low airflow speed, high environmental humidity requirements, and auxiliary heating of an adsorption stage in the current atmospheric water harvesting technologies. In the present disclosure, the active air supply device is used to speed up the air circulation in the harvester so as to greatly shorten the adsorption time of the moisture absorbing material for the water vapor in the air and improve the heat dissipation of the micro-nano structure condensation surface. The electric valve controls the air circulation circuit and cooperates with the active air supply device. In this case, only one active air supply device can be used to complete the air supply and the condensation heat dissipation at the same time.

Abstract: In semiconductor fabrication processes, one or more wafers are often exposed to processes such as chemical vapor deposition to form semiconductor components thereupon. Often, some of the wafers exhibit flaws due to contamination or processing errors occurring before, during, or after component formation. Inspection of the wafers is often performed by direct visual inspection of humans, which is prone to errors due to flaws that are too small to view directly; to particles naturally arising in the human eye; and to fatigue caused by inspection of large numbers of wafers. Presented herein are inspection techniques involving positioning the wafer in a dark chamber exposing the surface of the wafer to a light source at a first angle, and capturing with a camera an image of the light source reflected from the surface of the wafer at a second angle. Wafers identified as exhibiting flaws are removed from the wafer set.

Abstract: Embodiments of an exhaust gas recirculation (EGR) device comprise a mixing pipe having an air inlet port and an outlet port disposed at opposite ends of the mixing pipe, and an exhaust inlet port disposed at a region of the mixing pipe between the air inlet port and the outlet port, wherein the exhaust inlet port is configured to deliver exhaust to be mixed with air inside the mixing pipe. The exhaust gas recirculation (EGR) device further comprises a nozzle disposed internally within a region of the mixing pipe between the exhaust inlet ring and the outlet port such that the diffuser nozzle defines an outer mixing channel in the spacing between the diffuser nozzle and the mixing pipe region.

Abstract: An oil drainage device for an oil separator of an internal combustion engine includes a first chamber, a second chamber, a connector and a conduit. The first chamber receives oil from the oil separator. The second chamber is coupled to a sump. The connector extends between the first and second chambers. The connector defines a fluid path along which oil can flow between the first and second chambers. The conduit is disposed within the connector and provides a path for crankcase blow-by gases that is separate from the fluid path.

Abstract: A head cover assembly for covering a crankcase of an internal combustion engine includes a head cover and an integral oil separator. The oil separator includes a housing that defines a flow path that separates oil from crankcase gases passing therethrough. At least a portion of the housing is integrally formed along an inner surface of the head cover.

Abstract: An oil separator separates oil from crankcase gases of an internal combustion engine. The oil drainage device includes an inlet, an outlet and a plurality of stages arranged in a stack between the inlet and the outlet. Each stage includes a generally upright side wall having opposite top and bottom faces. An end wall is disposed at the bottom face of the side wall. The end wall has opposite upper and lower surfaces. The end wall has a bore extending through the upper and lower surfaces for receiving a flow of crankcase gases therethrough. A plate diverts the flow of crankcase gases exiting the bore for creating a pressure increase that separates oil from the crankcase gases. A tube extends through the bore for directing the flow of crankcase gases therethrough. The tube being spaced apart from an inner surface of the bore allowing oil to flow therethrough in an opposite direction relative to the crankcase gases.

Abstract: An oil separator that removes oil from ventilation gases flowing between a crankcase and an intake manifold of an internal combustion engine. The oil separator includes a housing having an inlet and an outlet. The housing includes a guide wall having a plurality of holes to allow gases to flow therethrough between the inlet and the outlet. A plate is movably coupled to the housing for movement between a closed position blocking the flow of gases through the holes in the guide wall and an open position spaced apart from the guide wall to allow gases to flow through at least one of the holes in the guide wall. A diaphragm has a movable portion coupled to the plate. The diaphragm defines a substantially closed volume continuous with the intake manifold so that pressure changes in the intake manifold causes corresponding displacement of the movable portion and the plate relative to the housing.

Abstract: An oil separator separates oil from crankcase gases of an internal combustion engine. The oil drainage device includes an inlet, an outlet and a plurality of stages arranged in a stack between the inlet and the outlet. Each stage includes a generally upright side wall having opposite top and bottom faces. An end wall is disposed at the bottom face of the side wall. The end wall has opposite upper and lower surfaces. The end wall has a bore extending through the upper and lower surfaces for receiving a flow of crankcase gases therethrough. A plate diverts the flow of crankcase gases exiting the bore for creating a pressure increase that separates oil from the crankcase gases. A tube extends through the bore for directing the flow of crankcase gases therethrough. The tube being spaced apart from an inner surface of the bore allowing oil to flow therethrough in an opposite direction relative to the crankcase gases.

Abstract: An oil drainage device for an oil separator of an internal combustion engine includes a first chamber, a second chamber, a connector and a conduit. The first chamber receives oil from the oil separator. The second chamber is coupled to a sump. The connector extends between the first and second chambers. The connector defines a fluid path along which oil can flow between the first and second chambers. The conduit is disposed within the connector and provides a path for crankcase blow-by gases that is separate from the fluid path.

Abstract: An oil separator is provided for removing oil from crankcase ventilation gases of an internal combustion engine. The oil separator includes a housing and a spiral shaped wall. The housing includes an inlet and an outlet. The spiral wall defines a spiral path for guiding the ventilation gases between the inlet and outlet of the housing. The spiral path has a width that decreases at a predetermined constant rate between the inlet and outlet of the housing.

Abstract: An oil separator that removes oil from ventilation gases flowing between a crankcase and an intake manifold of an internal combustion engine. The oil separator includes a housing, a wall and a diaphragm. The housing has an inlet and an outlet. The wall is cooperative with the housing to define a path through which the gases flow between the inlet and the outlet. The wall is movably coupled to the housing to effect a change in the height of the path. The diaphragm has a movable portion coupled to the wall. The diaphragm defines a substantially closed volume. The volume is open with the intake manifold so that pressure changes in the intake manifold causes corresponding displacement of the movable portion and the wall relative to the housing.

Abstract: An oil separator that removes oil from ventilation gases flowing between a crankcase and an intake manifold of an internal combustion engine. The oil separator includes a housing having an inlet and an outlet. The housing includes a guide wall having a plurality of holes to allow gases to flow therethrough between the inlet and the outlet. A plate is movably coupled to the housing for movement between a closed position blocking the flow of gases through the holes in the guide wall and an open position spaced apart from the guide wall to allow gases to flow through at least one of the holes in the guide wall. A diaphragm has a movable portion coupled to the plate. The diaphragm defines a substantially closed volume continuous with the intake manifold so that pressure changes in the intake manifold causes corresponding displacement of the movable portion and the plate relative to the housing.

Abstract: An oil separator that removes oil from ventilation gases flowing between a crankcase and an intake manifold of an internal combustion engine. The oil separator includes a housing, a wall and a diaphragm. The housing has an inlet and an outlet. The wall is cooperative with the housing to define a path through which the gases flow between the inlet and the outlet. The wall is movably coupled to the housing to effect a change in the height of the path. The diaphragm has a movable portion coupled to the wall. The diaphragm defines a substantially closed volume. The volume is open with the intake manifold so that pressure changes in the intake manifold causes corresponding displacement of the movable portion and the wall relative to the housing.

Abstract: An oil separator is provided for removing oil from crankcase ventilation gases of an internal combustion engine. The oil separator includes a housing and a spiral shaped wall. The housing includes an inlet and an outlet. The spiral wall defines a spiral path for guiding the ventilation gases between the inlet and outlet of the housing. The spiral path has a width that decreases at a predetermined constant rate between the inlet and outlet of the housing.

Abstract: The present invention provides a variable runner length intake air manifold operative to optimize the performance of an internal combustion engine over a wide range of engine speeds. The manifold includes a housing formed of upper and lower halves fixedly attached via conventional fastening means. The upper and lower halves define a plurality of runners having constant cross-sectional areas but different cross-sectional shapes. A tapered drum is disposed within the housing and includes one open end and a plurality of openings formed in the outer surface that communicate with corresponding runners of the housing. The tapered drum is rotatably mounted within the housing such that the effective runner length or airflow path of the manifold is made adjustable by varying the angular position of the tapered drum disposed within the housing.

Abstract: An assembly for a fluid coupling that includes a hub having a body portion defining a central bore therethrough, with a radially extending flange extending from the body portion, and with the hub formed of a material that has a higher melting temperature than aluminum. A wheel having an outer shell portion is cast about the radially extending flange, and has an integrally cast set of blades, with the outer shell and blades made of aluminum. The assembly also includes a shroud mounted to the set of blades.