Patents by Inventor Tent-Chao D. Tao

Tent-Chao D. Tao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Airflow management for particle abatement in semiconductor manufacturing equipment
    Patent number: 8500382
    Abstract: An airflow management system and/or method used in particle abatement in semiconductor manufacturing equipment. In particular, the apparatus disclosed is capable of creating and managing a carefully controlled particle free environment for the handling of semiconductor wafers or similar articles. The apparatus is particularly suited to be used as an interface between an equipment front end module (EFEM) and a vacuum loadlock chamber or other such article of process equipment. The apparatus also enables relative motion between enclosures while maintaining a particle free environment utilizing a moving air diffuser mounted to an interface panel.
    Type: Grant
    Filed: May 22, 2007
    Date of Patent: August 6, 2013
    Assignee: Axcelis Technologies Inc.
    Inventors: James S. Castantini, Tent-Chao D. Tao, Erin M. Madden, Donald N. Polner
  • AIRFLOW MANAGEMENT FOR PARTICLE ABATEMENT IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
    Publication number: 20080292432
    Abstract: An airflow management system and/or method used in particle abatement in semiconductor manufacturing equipment. In particular, the apparatus disclosed is capable of creating and managing a carefully controlled particle free environment for the handling of semiconductor wafers or similar articles. The apparatus is particularly suited to be used as an interface between an equipment front end module (EFEM) and a vacuum loadlock chamber or other such article of process equipment. The apparatus also enables relative motion between enclosures while maintaining a particle free environment utilizing a moving air diffuser mounted to an interface panel.
    Type: Application
    Filed: May 22, 2007
    Publication date: November 27, 2008
    Inventors: James S. Castantini, Tent-Chao D. Tao, Erin M. Madden, Donald N. Polner