Patents by Inventor Teresa Zimmerman

Teresa Zimmerman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluorine assisted stripping and residue removal in sapphire downstream plasma asher
    Patent number: 6082374
    Abstract: A method for removing material from a substrate. A plasma is generated in a plasma generating and discharge device including a sapphire plasma tube. At least one fluorine-containing compound is introduced into the plasma. A forming gas is introduced into the plasma. The plasma is directed toward the material to be removed from the substrate.
    Type: Grant
    Filed: September 24, 1997
    Date of Patent: July 4, 2000
    Inventors: Maria Huffman, Palanikumaran Sakthivel, Teresa Zimmerman, Thomas Noble