Patents by Inventor Teresita Q. Magtoto

Teresita Q. Magtoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Factory level and tool level advanced process control systems integration implementation
    Patent number: 7899566
    Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.
    Type: Grant
    Filed: January 2, 2009
    Date of Patent: March 1, 2011
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Emily M. Hwang, Yue Li, Teresita Q. Magtoto
  • Providing a dynamic sampling plan for integrated metrology
    Patent number: 7577537
    Abstract: A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Grant
    Filed: March 18, 2008
    Date of Patent: August 18, 2009
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • FACTORY LEVEL AND TOOL LEVEL ADVANCED PROCESS CONTROL SYSTEMS INTEGRATION IMPLEMENTATION
    Publication number: 20090118851
    Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.
    Type: Application
    Filed: January 2, 2009
    Publication date: May 7, 2009
    Inventors: Gary W. Behm, Emily M. Hwang, Yue Li, Teresita Q. Magtoto
  • Factory level and tool level advanced process control systems integration implementation
    Patent number: 7489980
    Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.
    Type: Grant
    Filed: July 27, 2006
    Date of Patent: February 10, 2009
    Assignee: International Business Machines Corporation
    Inventors: Gary W Behm, Emily M Hwang, Yue Li, Teresita Q Magtoto
  • PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
    Publication number: 20080167830
    Abstract: A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Application
    Filed: March 18, 2008
    Publication date: July 10, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • Method and system of providing a dynamic sampling plan for integrated metrology
    Patent number: 7398172
    Abstract: A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: July 8, 2008
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • METHOD AND SYSTEM OF PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
    Publication number: 20070282549
    Abstract: A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Application
    Filed: May 31, 2006
    Publication date: December 6, 2007
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • Integration of factory level and tool level advanced process control systems
    Patent number: 7113845
    Abstract: Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system.
    Type: Grant
    Filed: August 9, 2005
    Date of Patent: September 26, 2006
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Yue Li, Emily M. Hwang, Teresita Q. Magtoto