Patents by Inventor Terrance Allen Neal

Terrance Allen Neal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring wafer movement and placement using vibration data
    Patent number: 11342210
    Abstract: Embodiments disclose herein include a sensor wafer. In an embodiment, the sensor wafer comprises a substrate, wherein the substrate comprises a first surface, a second surface opposite the first surface, and an edge surface between the first surface and the second surface. In an embodiment, the sensor wafer further comprises a plurality of sensor regions formed along the first surface, wherein the sensor regions comprise self-referencing capacitive sensors. In an embodiment, the sensor wafer further comprises a vibration sensor embedded within the substrate.
    Type: Grant
    Filed: August 20, 2019
    Date of Patent: May 24, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Charles G. Potter, Terrance Allen Neal
  • METHOD AND APPARATUS FOR MEASURING WAFER MOVEMENT AND PLACEMENT USING VIBRATION DATA
    Publication number: 20200075369
    Abstract: Embodiments disclose herein include a sensor wafer. In an embodiment, the sensor wafer comprises a substrate, wherein the substrate comprises a first surface, a second surface opposite the first surface, and an edge surface between the first surface and the second surface. In an embodiment, the sensor wafer further comprises a plurality of sensor regions formed along the first surface, wherein the sensor regions comprise self-referencing capacitive sensors. In an embodiment, the sensor wafer further comprises a vibration sensor embedded within the substrate.
    Type: Application
    Filed: August 20, 2019
    Publication date: March 5, 2020
    Inventors: Charles G. Potter, Terrance Allen Neal