Patents by Inventor Terry L. Banks

Terry L. Banks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultra smooth face sputter targets and methods of producing same
    Patent number: 8556681
    Abstract: A method is provided to remove a thickness of a sputter target surface deformation layer to thereby achieve a reduced burn-in time during sputtering operations. The method comprises extrusion hone polishing of the target surface with a visco-elastic abrasive medium.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: October 15, 2013
    Assignee: Tosoh SMD, Inc.
    Inventors: Terry L. Banks, David B. Smathers
  • ULTRA SMOOTH FACE SPUTTER TARGETS AND METHODS OF PRODUCING SAME
    Publication number: 20100105296
    Abstract: A method is provided to remove a thickness of a sputter target surface deformation layer to thereby achieve a reduced burn-in time during sputtering operations. The method comprises extrusion hone polishing of the target surface with a visco-elastic abrasive medium.
    Type: Application
    Filed: January 29, 2008
    Publication date: April 29, 2010
    Applicant: Tosoh SMD, Inc.
    Inventors: Terry L. Banks, David B. Smathers