Abstract: A system for obtaining temperature measurements. The system includes a photoluminescent target. The photoluminescent target includes a photoluminescent coating and a thermally conductive skeleton. The photoluminescent coating, when exposed to excitation light received from an interrogation unit, reemits light in a temperature-dependent manner, and the interrogation unit obtains a temperature measurement based on the reemitted light. The thermally conductive skeleton structure is configured to establish an even temperature distribution across the photoluminescent target, and to provide a support matrix for the photoluminescent coating that surrounds the skeleton structure. The photoluminescent target thermally interfaces with a target body from which the temperature measurement is to be obtained.

Abstract: A low-reflection fiber-optic connector. The fiber-optic connector includes a ferrule that includes a fiber passage and an optical fiber traversing the fiber passage. The optical fiber includes a polished fiber end that is substantially flush with a ferrule end face. The ferrule end face, in an area surrounding the polished fiber end, is modified to reduce an optical reflectivity.

Abstract: A temperature probe for use in a chamber. The temperature probe includes a hollow standoff mounted on a floor of the chamber, and equipped with a side-hole. The temperature probe further includes a cap fixed to the top of the standoff. The bottom surface of the cap includes a coating. The temperature probe also includes a light pipe disposed perpendicularly to the standoff and a shield disposed around the light pipe. A top surface of the cap is co-planar with a bottom surface of an object whose temperature is being measured. A sensing end of the light pipe is inserted into the side-hole of the standoff. An opening in the shield allows transmission of light between the sensing end of the light pipe and the coating. The light pipe and the shield pass through a feed-through in a sidewall of the chamber.

Abstract: A system for obtaining temperature measurements. The system includes a photoluminescent target. The photoluminescent target includes a photoluminescent coating and a thermally conductive skeleton. The photoluminescent coating, when exposed to excitation light received from an interrogation unit, reemits light in a temperature-dependent manner, and the interrogation unit obtains a temperature measurement based on the reemitted light. The thermally conductive skeleton structure is configured to establish an even temperature distribution across the photoluminescent target, and to provide a support matrix for the photoluminescent coating that surrounds the skeleton structure. The photoluminescent target thermally interfaces with a target body from which the temperature measurement is to be obtained.

Abstract: A temperature probe for use in a chamber. The temperature probe includes a hollow standoff mounted on a floor of the chamber, and equipped with a side-hole. The temperature probe further includes a cap fixed to the top of the standoff The bottom surface of the cap includes a coating. The temperature probe also includes a light pipe disposed perpendicularly to the standoff and a shield disposed around the light pipe. A top surface of the cap is co-planar with a bottom surface of an object whose temperature is being measured. A sensing end of the light pipe is inserted into the side-hole of the standoff An opening in the shield allows transmission of light between the sensing end of the light pipe and the coating. The light pipe and the shield pass through a feed-through in a sidewall of the chamber.

Abstract: A bidirectional optoelectronic sub-assembly. The bidirectional optoelectronic sub-assembly includes an assembly body. The assembly body is configured to interface a light source, a photodetector, an optical waveguide, coupling optics and a beam splitter in optical alignment. The assembly body includes a light source port configured to accommodate the light source, an optical port configured to interface with an optical connector of the optical waveguide, a beam splitter slot configured to accommodate the beam splitter on a first optical path between the light source and the optical waveguide, and on a second optical path between the optical waveguide and the photodetector, and a faraday cage cavity configured to accommodate the photodetector.

Abstract: A system for obtaining a measurement of a species of interest. The system includes one or more reference regions, a sensor region, an exciter unit, a detector unit and a processing unit. The exciter unit exposes first and second chemical transducers in the reference and sensor regions, respectively, to an excitation light while they are exposed to reference environments and an analyte, respectively. The detector unit measures responses of the first and the second chemical transducers to the excitation light. The processing unit determines a compensation for aging of the first chemical transducer from a discrepancy between the measurements of the responses of the first chemical transducer and reference responses. The processing unit applies the compensation for aging to the measurement of the response of the second chemical transducer to obtain the measurement of the species of interest in the analyte.

Abstract: A low-reflection fiber-optic connector. The fiber-optic connector includes a ferrule that includes a fiber passage and an optical fiber traversing the fiber passage. The optical fiber includes a polished fiber end that is substantially flush with a ferrule end face. The ferrule end face, in an area surrounding the polished fiber end, is modified to reduce an optical reflectivity.

Abstract: A system for obtaining a measurement of a species of interest. The system includes one or more reference regions, a sensor region, an exciter unit, a detector unit and a processing unit. The exciter unit exposes first and second chemical transducers in the reference and sensor regions, respectively, to an excitation light while they are exposed to reference environments and an analyte, respectively. The detector unit measures responses of the first and the second chemical transducers to the excitation light. The processing unit determines a compensation for aging of the first chemical transducer from a discrepancy between the measurements of the responses of the first chemical transducer and reference responses. The processing unit applies the compensation for aging to the measurement of the response of the second chemical transducer to obtain the measurement of the species of interest in the analyte.

Abstract: A method for analyzing gas dissolved within a fluid filled asset includes extracting the fluid from the fluid filled asset, circulating the fluid though a first fluid loop, and passing the extracted fluid along a first side of a gas permeable membrane. Gas is extracted from a second side of the gas permeable membrane and the extracted gas is circulated through a second fluid loop. The first fluid loop and the second fluid loop are separated by the gas permeable membrane. The method further includes controlling a pressure differential across the gas permeable membrane to a predetermined pressure differential and providing the extracted gas to a gas analysis unit located within the second fluid loop. The chemical makeup of the extracted gas is periodically determined using the gas analysis unit.

Abstract: A method for analyzing gas dissolved within a fluid filled asset includes extracting the fluid from the fluid filled asset, circulating the fluid though a first fluid loop, and passing the extracted fluid along a first side of a gas permeable membrane. Gas is extracted from a second side of the gas permeable membrane and the extracted gas is circulated through a second fluid loop. The first fluid loop and the second fluid loop are separated by the gas permeable membrane. The method further includes controlling a pressure differential across the gas permeable membrane to a predetermined pressure differential and providing the extracted gas to a gas analysis unit located within the second fluid loop. The chemical makeup of the extracted gas is periodically determined using the gas analysis unit.

Abstract: A vacuum processing chamber for measuring the temperature of a surface of an object comprising a cap is provided. The cap has a non-deformable end wall of thermally conducting material and a side wall connected thereto. An outside surface of the end wall is shaped to conform to a shape of the object surface to be measured. A surface on an inside of the end wall of the cap emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap end wall. The vacuum processing chamber further comprises a light wave guide having one end held within the cap a distance from the radiation emitting element and in optical communication therewith.

Abstract: A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object, and (iii) a light waveguide in optical communication with the layer of luminescent material, is provided. A test device for measuring a temperature in a processing step comprising (i) an object having a surface and having a recess in the surface of the object, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object in response to a source of excitation radiation, and (iii) an optical window that seals said layer of luminescent material in the recess in the surface of the object, is provided.

Abstract: A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.

Abstract: A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.

Abstract: A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.

Abstract: A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.